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A Room Temperature H2 Sensor Fabricated Using High Performance Pt-Loaded SnO2 Nanoparticles
Article

Highly Sensitive H2S Sensor Based on the Metal-Catalyzed SnO2 Nanocolumns Fabricated by Glancing Angle Deposition

by 1,*,†, 2,3,†, 2, 2 and 2,3,*
1
Department of Materials Science and Engineering, University of Seoul, 163, Seoulsiripdae-ro, Dongdaemun-gu, Seoul 130-743, Korea
2
Center for Electronic Materials, Korea Institute of Science and Technology, 5, Hwarang-ro 14-gil, Seongbuk-gu, Seoul 136-791, Korea
3
KU-KIST Graduate School of Converging Science and Technology, Korea University, 145, Anam-ro, Seongbuk-gu, Seoul 136-701, Korea
*
Authors to whom correspondence should be addressed.
These authors contributed equally to this work.
Academic Editor: Michael Tiemann
Sensors 2015, 15(7), 15468-15477; https://0-doi-org.brum.beds.ac.uk/10.3390/s150715468
Received: 29 May 2015 / Revised: 24 June 2015 / Accepted: 25 June 2015 / Published: 30 June 2015
(This article belongs to the Special Issue Gas Sensors—Designs and Applications)
As highly sensitive H2S gas sensors, Au- and Ag-catalyzed SnO2 thin films with morphology-controlled nanostructures were fabricated by using e-beam evaporation in combination with the glancing angle deposition (GAD) technique. After annealing at 500 °C for 40 h, the sensors showed a polycrystalline phase with a porous, tilted columnar nanostructure. The gas sensitivities (S = Rgas/Rair) of Au and Ag-catalyzed SnO2 sensors fabricated by the GAD process were 0.009 and 0.015, respectively, under 5 ppm H2S at 300 °C, and the 90% response time was approximately 5 s. These sensors showed excellent sensitivities compared with the SnO2 thin film sensors that were deposited normally (glancing angle = 0°, S = 0.48). View Full-Text
Keywords: H2S sensor; nanosensor; SnO2 nanocolumn; glancing angle deposition H2S sensor; nanosensor; SnO2 nanocolumn; glancing angle deposition
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MDPI and ACS Style

Yoo, K.S.; Han, S.D.; Moon, H.G.; Yoon, S.-J.; Kang, C.-Y. Highly Sensitive H2S Sensor Based on the Metal-Catalyzed SnO2 Nanocolumns Fabricated by Glancing Angle Deposition. Sensors 2015, 15, 15468-15477. https://0-doi-org.brum.beds.ac.uk/10.3390/s150715468

AMA Style

Yoo KS, Han SD, Moon HG, Yoon S-J, Kang C-Y. Highly Sensitive H2S Sensor Based on the Metal-Catalyzed SnO2 Nanocolumns Fabricated by Glancing Angle Deposition. Sensors. 2015; 15(7):15468-15477. https://0-doi-org.brum.beds.ac.uk/10.3390/s150715468

Chicago/Turabian Style

Yoo, Kwang S., Soo D. Han, Hi G. Moon, Seok-Jin Yoon, and Chong-Yun Kang. 2015. "Highly Sensitive H2S Sensor Based on the Metal-Catalyzed SnO2 Nanocolumns Fabricated by Glancing Angle Deposition" Sensors 15, no. 7: 15468-15477. https://0-doi-org.brum.beds.ac.uk/10.3390/s150715468

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