Stable Field Emission from Vertically Oriented SiC Nanoarrays
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
Appendix A
References
- Iijima, S. Helical Microtubules of Graphitic Carbon. Nature 1991, 354, 56–58. [Google Scholar] [CrossRef]
- Casady, J.B.; Johnson, R.W. Status of silicon carbide (SiC) as a wide-bandgap semiconductor for high-temperature applications: A review. Solid-State Electron. 1996, 39, 1409–1422. [Google Scholar] [CrossRef]
- Wong, E.W.; Sheehan, P.E.; Lieber, C.M. Nanobeam Mechanics: Elasticity, Strength, and Toughness of Nanorods and Nanotubes. Science 1997, 277, 1971–1975. [Google Scholar] [CrossRef]
- Fan, J.Y.; Wu, X.L.; Chu, P.K. Low-dimensional SiC nanostructures: Fabrication, luminescence, and electrical properties. Prog. Mater. Sci. 2006, 51, 983–1031. [Google Scholar] [CrossRef]
- Chen, S.L.; Li, W.J.; Li, X.X.; Yang, W.Y. One-dimensional SiC nanostructures: Designed growth, properties, and applications. Prog. Mater. Sci. 2019, 104, 138–214. [Google Scholar] [CrossRef]
- Yang, Y.; Meng, G.; Liu, X.; Zhang, L.; Hu, Z.; He, C.; Hu, Y. Aligned SiC Porous Nanowire Arrays with Excellent Field Emission Properties Converted from Si Nanowires on Silicon Wafer. J. Phys. Chem. C 2008, 112, 20126–20130. [Google Scholar] [CrossRef]
- Wei, G.D.; Qin, W.P.; Kim, R.J.; Sun, J.B.; Zhu, P.F.; Wang, G.F.; Wang, L.L.; Zhang, D.S.; Zheng, K.Z. Quantum confinement effect and field emission characteristics of ultrathin 3C-SiC nanobelts. Chem. Phys. Lett. 2008, 461, 242–245. [Google Scholar] [CrossRef]
- Chen, C.M.; Chen, S.L.; Shang, M.H.; Gao, F.M.; Yang, Z.B.; Liu, Q.; He, Z.Y.; Yang, W.Y. Fabrication of highly oriented 4H-SiC gourd-shaped nanowire arrays and their field emission properties. J. Mater. Chem. C 2016, 4, 5195–5201. [Google Scholar] [CrossRef]
- Wang, L.; Jiang, L.; Zhang, T.; Gao, F.M.; Chen, S.L.; Yang, W.Y. Graphene/SiC heterojunction nanoarrays: Toward field emission applications with low turn-on fields and high stabilities. J. Mater. Chem. C 2019, 7, 13748–13753. [Google Scholar] [CrossRef]
- Doǧan, S.; Teke, A.; Huang, D.; Morkoç, H.; Roberts, C.B.; Parish, J.; Ganguly, B.; Smith, M.; Myers, R.E.; Saddow, S.E. 4H–SiC photoconductive switching devices for use in high-power applications. Appl. Phys. Lett. 2003, 82, 3107–3109. [Google Scholar] [CrossRef]
- Chen, Z.; Bai, S.; Li, G.; Li, X.; Wan, H. Intense electron emission of SiC nanowires cathode used in high power microwave. High Power Laser Part. Beams 2010, 22, 2945–2948. [Google Scholar] [CrossRef]
- Matsunami, H. Current SiC Technology for Power Electronic Devices Beyond Si. Microelectron. Eng. Microelectron. Eng. 2006, 83, 2–4. [Google Scholar] [CrossRef]
- Wu, R.B.; Zhou, K.; Wei, J.; Huang, Y.Z.; Su, F.; Chen, J.J.; Wang, L.Y. Growth of Tapered SiC Nanowires on Flexible Carbon Fabric: Toward Field Emission Applications. J. Phys. Chem. C 2012, 116, 12940–12945. [Google Scholar] [CrossRef]
- Zhou, X.T.; Lai, H.L.; Peng, H.Y.; Au, F.C.K.; Liao, L.S.; Wang, N.; Bello, I.; Lee, C.S.; Lee, S.T. Thin β-SiC nanorods and their field emission properties. Chem. Phys. Lett. 2000, 318, 58–62. [Google Scholar] [CrossRef]
- Tang, S.; Tang, J.; Uzuhashi, J.; Ohkubo, T.; Hayami, W.; Yuan, J.S.; Takeguchi, M.; Mitome, M.; Qin, L.C. A stable LaB6 nanoneedle field-emission point electron source. Nanoscale Adv. 2021, 3, 2787–2792. [Google Scholar] [CrossRef]
- Wu, R.; Zhou, K.; Yue, C.Y.; Wei, J.; Pan, Y. Recent progress in synthesis, properties and potential applications of SiC nanomaterials. Prog. Mater. Sci. 2015, 72, 1–60. [Google Scholar] [CrossRef]
- van Zuuk, A.; Heerkens, C.T.H.; van Veen, A.H.V.; Teepen, T.F.; Wieland, M.J.; Groening, O.; Kruit, P. Fabrication and characterization of silicon carbide field-emitter array. Microelectron. Eng. 2004, 73-74, 106–110. [Google Scholar] [CrossRef]
- Chen, S.L.; Ying, P.Z.; Wang, L.; Wei, G.D.; Gao, F.M.; Zheng, J.J.; Shang, M.H.; Yang, Z.B.; Yang, W.Y.; Wu, T. Highly flexible and robust N-doped SiC nanoneedle field emitters. Npg Asia Mater. 2015, 7, e157. [Google Scholar] [CrossRef] [Green Version]
- Shen, G.; Bando, Y.; Golberg, D. Self-Assembled Hierarchical Single-Crystalline β-SiC Nanoarchitectures. Cryst. Growth Des. 2007, 7, 35–38. [Google Scholar] [CrossRef]
- Kang, M.G.; Lezec, H.J.; Sharifi, F. Stable field emission from nanoporous silicon carbide. Nanotechnology 2013, 24, 065201. [Google Scholar] [CrossRef]
- Oehrlein, G.S.; Tromp, R.M.; Tsang, J.C.; Lee, Y.H.; Petrillo, E.J. Near-Surface Damage and Contamination after CF4/H2 Reactive Ion Etching of Si. J. Electrochem. Soc. 1985, 132, 1441. [Google Scholar] [CrossRef]
- Sugiura, J.; Lu, W.J.; Cadien, K.C.; Steckl, A.J. Reactive Ion Etching of SiC Thin-Films Using Fluorinated Gases. J. Vac. Sci. Technol. B 1986, 4, 349–354. [Google Scholar] [CrossRef] [Green Version]
- Chabert, P.; Cunge, G.; Booth, J.P.; Perrin, J. Reactive ion etching of SiC in SF6 gas: Detection of CF, CF2 and SiF2 etch products. Appl. Phys. Lett. 2001, 79, 916–918. [Google Scholar]
- Kawahara, K.; Krieger, M.; Suda, J.; Kimoto, T. Deep levels induced by reactive ion etching in n- and p-type 4H-SiC. J. Appl. Phys. 2010, 108, 023706. [Google Scholar] [CrossRef] [Green Version]
- Hamelin, B.; Yang, J.; Ayazi, F. Precision Deep Reactive Ion Etching of Monocrystalline 4H-SiCOI for Bulk Acoustic Wave Resonators with Ultra-Low Dissipation. J. Electrochem. Soc. 2021, 168, 017512. [Google Scholar] [CrossRef]
- Gupta, A.P.; Park, S.; Yeo, S.J.; Jung, J.; Cho, C.; Paik, S.H.; Park, H.; Cho, Y.C.; Kim, S.H.; Shin, J.H.; et al. Direct Synthesis of Carbon Nanotube Field Emitters on Metal Substrate for Open-Type X-ray Source in Medical Imaging. Materials 2017, 10, 878. [Google Scholar] [CrossRef]
- Choueib, M.; Martel, R.; Cojocaru, C.S.; Ayari, A.; Vincent, P.; Purcell, S.T. Current saturation in field emission from H-passivated Si nanowires. ACS Nano 2012, 6, 7463–7471. [Google Scholar] [CrossRef] [Green Version]
- Chu, F.H.; Huang, C.W.; Hsin, C.L.; Wang, C.W.; Yu, S.Y.; Yeh, P.H.; Wu, W.W. Well-aligned ZnO nanowires with excellent field emission and photocatalytic properties. Nanoscale 2012, 4, 1471–1475. [Google Scholar] [CrossRef]
- Wang, Z.L.; Wang, Q.; Li, H.J.; Li, J.J.; Xu, P.; Luo, Q.; Jin, A.Z.; Yang, H.F.; Gu, C.Z. The field emission properties of high aspect ratio diamond nanocone arrays fabricated by focused ion beam milling. Sci. Technol. Adv. Mater. 2005, 6, 799–803. [Google Scholar] [CrossRef] [Green Version]
- Zhang, J.; Xu, J.; Ji, D.X.; Xu, H.; Sun, M.; Wu, L.; Li, X.Y.; Wang, Q.L.; Zhang, X.B. Development of an electron gun based on CNT-cathode for traveling wave tube application. Vacuum 2021, 186, 110029. [Google Scholar] [CrossRef]
- Park, S.; Gupta, A.P.; Yeo, S.J.; Jung, J.; Paik, S.H.; Mativenga, M.; Kim, S.H.; Shin, J.H.; Ahn, J.S.; Ryu, J. Carbon Nanotube Field Emitters Synthesized on Metal Alloy Substrate by PECVD for Customized Compact Field Emission Devices to Be Used in X-Ray Source Applications. Nanomaterials 2018, 8, 378. [Google Scholar] [CrossRef] [Green Version]
- Gupta, A.P.; Yeo, S.J.; Mativenga, M.; Jung, J.; Kim, W.; Lim, J.; Park, J.; Ahn, J.S.; Kim, S.H.; Chae, M.S.; et al. A feasibility study of a portable intraoperative specimen imaging X-ray system based on carbon nanotube field emitters. Int. J. Imaging Syst. Technol. 2021, 31, 1128–1135. [Google Scholar] [CrossRef]
- Han, S.Y.; Kim, K.H.; Kim, J.K.; Jang, H.W.; Lee, K.H.; Kim, N.; Kim, E.D.; Lee, J. Ohmic contact formation mechanism of Ni on n-type 4H-SiC. Appl. Phys. Lett. 2001, 79, 1816–1818. [Google Scholar] [CrossRef] [Green Version]
- Liu, Y.H.; Sun, Y.J.; Zhao, G.J.; Liao, L.M.; Wang, T.; Chen, Z.Z. Crystal structure induced residue formation on 4H-SiC by reactive ion etching. Aip Adv. 2016, 6, 065219. [Google Scholar] [CrossRef] [Green Version]
- Wang, Y.X.; Wen, J.; Guo, Z.; Tang, Y.Q.; Tang, H.G.; Wu, J.X. The preparation of single-crystal 4H-SiC film by pulsed XeCl laser deposition. Thin Solid Film. 1999, 338, 93–99. [Google Scholar] [CrossRef]
- Cole, M.T.; Parmee, R.J.; Kumar, A.; Collins, C.M.; Kang, M.H.; Xiao, J.; Cepek, C.; Yuan, X.; Milne, W.I. Conjugated polyelectrolyte nano field emission adlayers. Nanoscale Horiz. 2016, 1, 304–312. [Google Scholar] [CrossRef] [Green Version]
- Choueib, M.; Ayari, A.; Vincent, P.; Bechelany, M.; Cornu, D.; Purcell, S.T. Strong deviations from Fowler-Nordheim behavior for field emission from individual SiC nanowires due to restricted bulk carrier generation. Phys. Rev. B 2009, 79, 075421. [Google Scholar] [CrossRef]
- Baskin, L.M.; Lvov, O.I.; Fursey, G.N. General features of field emission from semiconductors. Phys. Status Solidi 2010, 47, 49–62. [Google Scholar] [CrossRef]
- Liu, K.X.; Chiang, C.J.; Heritage, J.P. Photoresponse of gated p-silicon field emitter array and correlation with theoretical models. J. Appl. Phys. 2006, 99, 034502. [Google Scholar] [CrossRef]
- John, R.A., Jr. Photosensitive Field Emission from p-Type Germanium. J. Appl. Phys. 1965, 36, 3221–3227. [Google Scholar] [CrossRef]
- Carapezzi, S.; Castaldini, A.; Fabbri, F.; Rossi, F.; Negri, M.; Salviati, G.; Cavallini, A. Cold field electron emission of large-area arrays of SiC nanowires: Photo-enhancement and saturation effects. J. Mater. Chem. C 2016, 4, 8226–8234. [Google Scholar] [CrossRef]
- Ryu, Y.; Tak, Y.; Yong, K. Direct growth of core–shell SiC–SiO2 nanowires and field emission characteristics. Nanotechnology 2005, 16, S370–S374. [Google Scholar] [CrossRef]
- Pan, Z.W.; Lai, H.L.; Au, F.C.K.; Duan, X.F.; Zhou, W.Y.; Shi, W.S.; Wang, N.; Lee, C.S.; Wong, N.B.; Lee, S.T.; et al. Oriented silicon carbide nanowires: Synthesis and field emission properties. Adv. Mater. 2000, 12, 1186–1190. [Google Scholar] [CrossRef]
- Fowler, R.H.; Nordheim, L. Electron emission in intense electric fields. Proc. R. Soc. Lond. Ser. A-Contain. Pap. Math. Phys. Character 1928, 119, 173–181. [Google Scholar] [CrossRef]
Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations. |
© 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
Share and Cite
Xiao, J.; Zhao, J.; Liu, G.; Cole, M.T.; Zhou, S.; Chen, K.; Liu, X.; Li, Z.; Li, C.; Dai, Q. Stable Field Emission from Vertically Oriented SiC Nanoarrays. Nanomaterials 2021, 11, 3025. https://0-doi-org.brum.beds.ac.uk/10.3390/nano11113025
Xiao J, Zhao J, Liu G, Cole MT, Zhou S, Chen K, Liu X, Li Z, Li C, Dai Q. Stable Field Emission from Vertically Oriented SiC Nanoarrays. Nanomaterials. 2021; 11(11):3025. https://0-doi-org.brum.beds.ac.uk/10.3390/nano11113025
Chicago/Turabian StyleXiao, Jianfeng, Jiuzhou Zhao, Guanjiang Liu, Mattew Thomas Cole, Shenghan Zhou, Ke Chen, Xinchuan Liu, Zhenjun Li, Chi Li, and Qing Dai. 2021. "Stable Field Emission from Vertically Oriented SiC Nanoarrays" Nanomaterials 11, no. 11: 3025. https://0-doi-org.brum.beds.ac.uk/10.3390/nano11113025