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Review

Time-Of-Flight ERDA for Depth Profiling of Light Elements

Graduate School of Life and Environmental Science, Kyoto Prefectural University, 1 Hangicho, Shimogamo, Sakyo-Ku, Kyoto 606-8522, Japan
Quantum Beam Sci. 2020, 4(4), 40; https://0-doi-org.brum.beds.ac.uk/10.3390/qubs4040040
Received: 4 August 2020 / Revised: 26 October 2020 / Accepted: 16 November 2020 / Published: 18 November 2020
(This article belongs to the Special Issue Surface Analysis of Materials With Charged-Particle Beams)
The time-of-flight elastic recoil detection analysis (TOF-ERDA) method is one of the ion beam analysis methods that is capable of analyzing light elements in a sample with excellent depth resolution. In this method, simultaneous measurements of recoil ion energy and time of flight are performed, and ion mass is evaluated. The energy of recoil ions is calculated from TOF, which gives better energy resolution than conventional Silicon semiconductor detectors (SSDs). TOF-ERDA is expected to be particularly applicable for the analysis of light elements in thin films. In this review, the principle of TOF-ERDA measurement and details of the measurement equipment along with the performance of the instrumentation, including depth resolution and measurement sensitivity, are described. Examples of TOF-ERDA analysis are presented with a focus on the results obtained from the measurement system developed by the author. View Full-Text
Keywords: TOF-ERDA; ERDA; light elements; depth profiling TOF-ERDA; ERDA; light elements; depth profiling
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MDPI and ACS Style

Yasuda, K. Time-Of-Flight ERDA for Depth Profiling of Light Elements. Quantum Beam Sci. 2020, 4, 40. https://0-doi-org.brum.beds.ac.uk/10.3390/qubs4040040

AMA Style

Yasuda K. Time-Of-Flight ERDA for Depth Profiling of Light Elements. Quantum Beam Science. 2020; 4(4):40. https://0-doi-org.brum.beds.ac.uk/10.3390/qubs4040040

Chicago/Turabian Style

Yasuda, Keisuke. 2020. "Time-Of-Flight ERDA for Depth Profiling of Light Elements" Quantum Beam Science 4, no. 4: 40. https://0-doi-org.brum.beds.ac.uk/10.3390/qubs4040040

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