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Article

Development of Pulsed TEM Equipped with Nitride Semiconductor Photocathode for High-Speed Observation and Material Nanofabrication

1
Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University, Osaka 565-0871, Japan
2
Photo Electron Soul Inc., Tokyo 100-8901, Japan
3
Institute of Materials and Systems for Sustainability Center for Integrated Research of Future Electronics, Nagoya University, Aichi 464-8601, Japan
*
Author to whom correspondence should be addressed.
Received: 21 December 2020 / Revised: 26 January 2021 / Accepted: 27 January 2021 / Published: 1 February 2021
The development of pulsed electron sources is applied to electron microscopes or electron beam lithography and is effective in expanding the functions of such devices. The laser photocathode can generate short pulsed electrons with high emittance, and the emittance can be increased by changing the cathode substrate from a metal to compound semiconductor. Among the substrates, nitride-based semiconductors with a negative electron affinity (NEA) have good advantages in terms of vacuum environment and cathode lifetime. In the present study, we report the development of a photocathode electron gun that utilizes photoelectron emission from a NEA-InGaN substrate by pulsed laser excitation, and the purpose is to apply it to material nanofabrication and high-speed observation using a pulsed transmission electron microscope (TEM) equipped with it. View Full-Text
Keywords: laser photocathode; pulsed electron sources; pulsed transmission electron microscope laser photocathode; pulsed electron sources; pulsed transmission electron microscope
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MDPI and ACS Style

Yasuda, H.; Nishitani, T.; Ichikawa, S.; Hatanaka, S.; Honda, Y.; Amano, H. Development of Pulsed TEM Equipped with Nitride Semiconductor Photocathode for High-Speed Observation and Material Nanofabrication. Quantum Beam Sci. 2021, 5, 5. https://0-doi-org.brum.beds.ac.uk/10.3390/qubs5010005

AMA Style

Yasuda H, Nishitani T, Ichikawa S, Hatanaka S, Honda Y, Amano H. Development of Pulsed TEM Equipped with Nitride Semiconductor Photocathode for High-Speed Observation and Material Nanofabrication. Quantum Beam Science. 2021; 5(1):5. https://0-doi-org.brum.beds.ac.uk/10.3390/qubs5010005

Chicago/Turabian Style

Yasuda, Hidehiro, Tomohiro Nishitani, Shuhei Ichikawa, Shuhei Hatanaka, Yoshio Honda, and Hiroshi Amano. 2021. "Development of Pulsed TEM Equipped with Nitride Semiconductor Photocathode for High-Speed Observation and Material Nanofabrication" Quantum Beam Science 5, no. 1: 5. https://0-doi-org.brum.beds.ac.uk/10.3390/qubs5010005

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