3D Optical Inspection of Complex Surfaces for Micromachined Parts and Products

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E:Engineering and Technology".

Deadline for manuscript submissions: closed (28 February 2022) | Viewed by 2733

Special Issue Editors


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Guest Editor
Optical Imaging and Metrology Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea
Interests: interferometry; optical imaging system; optical based micromachining

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Co-Guest Editor
Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Korea
Interests: advancing ultra-precision light source technology from an IR to an EUV regime using the optical comb of the femtosecond pulse laser, and its interdisciplinary applications including precision spectroscopy, time/frequency standards, precision laser ranging, optical metrology, and nano/micro material processing
Special Issues, Collections and Topics in MDPI journals

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Co-Guest Editor
Department of Mechanical Engineering, KU Leuven, 3001 Leuven, Belgium
Interests: surfaces in the context of manufacturing; creating surfaces; finishing surfaces and modifying surfaces; subtractive and hybrid manufacturing processes; micro-machining; laser material processing and surface modification
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

The manufacturing process for micromachined parts and products becomes more complicated and sophisticated in order to meet diverse customer needs as well as respond the rapid changes in the emerging technological trends. To ensure high-quality of products by preventing any defects in manufacturing, precision inspection is essential. So, the growth of precision manufacturing has driven the advancement of related measurement technologies. As an example, in semiconductor industry, the development of 3D packaging technology emerged in the past decades has led to a new paradigm for manufacturing process by providing a volumetric packaging solution for higher integration and performance. As a result, it also has led to an increase in the industrial demands for 3D inspection of complex surfaces that can be in use across the high-tech industry for various applications. The innovation of manufacturing technology has been possible because of rapid advances in measurement techniques. It means that manufacturing technology can advance along with parallel advances in measurement technology. Accordingly, this special issue aims to cover the reviews or articles that focus on the advances in 3D optical inspection techniques of complex surfaces for micromachined parts and products used in widespread applications ranging over, but limited to semiconductor, display, automotive, aerospace, and clean energy. Also, the challenges and technical limitations of measurement techniques facing the current industry are welcomed.

Dr. Young-Sik Ghim
Prof. Dr. Young-Jin Kim
Prof. Dr. Sylvie Castange
Guest Editors

Manuscript Submission Information

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Keywords

  • 3D Inspection
  • Complex surfaces
  • Measurement technique

Published Papers (1 paper)

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Review

20 pages, 21370 KiB  
Review
Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures
by Ki-Nam Joo and Hyo-Mi Park
Micromachines 2022, 13(7), 1074; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13071074 - 07 Jul 2022
Cited by 3 | Viewed by 2246
Abstract
In this review, we present the recent progress on film metrology focused on the advanced and novel technologies during the last two decades. This review consists of various technologies and their measurement schemes to provide the inspiration for understanding each of the measurement [...] Read more.
In this review, we present the recent progress on film metrology focused on the advanced and novel technologies during the last two decades. This review consists of various technologies and their measurement schemes to provide the inspiration for understanding each of the measurement principles and applications. In the technology and analysis section, several optical techniques used in film metrology are introduced and described with their benefits and limitations. The temporal, spatial and snapshot measurement schemes of optical film metrology are introduced in the measurement scheme section, and finally, the prospect on optical film metrology will be provided and discussed with the technology trend. Full article
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