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Micromachines
Special Issues
MEMS Devices for Nanomanufacturing
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MEMS Devices for Nanomanufacturing

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (15 April 2022) | Viewed by 26030

Special Issue Editors

Dr. Michael Cullinan

E-Mail Website
Guest Editor
Department of Mechanical Engineering, University of Texas at Austin, Austin, TX 78712, USA
Interests: design and development of nanomanufacturing processes and equipment; metrology of micro and nanomanufacturing; the application of nanoscale science in engineering; the engineering of thin films, nanotubes and nanowires; the manufacturing and assembly of nanostructured materials; MEMS and NEMS for mechanical sensors and energy systems
Dr. Joon Hyong Cho

E-Mail Website
Guest Editor
Department of Mechanical Engineering, University of Texas at Austin, Austin, TX 78712, USA
Interests: graphene; MEMS/NEMS physical sensors
Dr. Dipankar Behera

E-Mail Website
Guest Editor
Department of Mechanical Engineering, University of Texas at Austin, Austin, TX 78712, USA
Interests: additive manufacturing; precision mechanisms; nanofabrication; MEMS; product design; AR/VR systems design and integration; mechatronics; advanced lithography; micro/nano technologies
Dr. David Cayll

E-Mail Website
Guest Editor
Department of Mechanical Engineering, University of Texas at Austin, Austin, TX 78712, USA
Interests: novel MEMS device geometries; application specific design; multiscale modeling and design; in-situ characterization; compliant mechanisms; acoustic and ultrasonic transducers; polymer mechanical testing; novel material integration; 2D materials; graphene

Special Issue Information

Dear colleagues,

High-volume nanomanufacturing is a key technology driver crucial for the development of novel, high-performance, and low-cost miniaturized products with applications in several industries, such as microelectronics, energy, medical devices, etc. However, materials development and quality control of production in nanoscale have been two of the most difficult challenges due to new approaches required to produce and test nanomaterials in nanoscale. Developing materials for nanoscale applications requires higher precision in the placement and manipulation of the material. In addition, nanomaterial requires a more detailed analysis to find defects and to perform quality control, which only can be done by atomic level analysis equipment. These challenges can be effectively addressed with the development of application-specific MEMS and NEMS devices to fulfill the requirements of precision, scalability, process control, and metrology.

For this Special Issue, we invite you to contribute to the design, development, production, and testing of nanomaterials using MEMS devices for nanomanufacturing. The broader scope of the special issue will cover the spectrum of the nanomanufacturing process flow from start to end, manufacturing process design, novel production methods, nanomaterial testing using MEMS devices, and approaches to improve the scalability of the process from a high throughput environment.

Dr. Michael Cullinan
Dr. Joon Hyong Cho
Dr. Dipankar Behera
Dr. David Cayll
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS/NEMS devices and sensors
  • Nanomaterial and 2D material development and testing
  • Nanomanufacturing process design and integration
  • High throughput nanomanufacturing
  • Nanomanufacturing process control

Published Papers (7 papers)

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Research

Jump to: Review

18 pages, 2320 KiB  
Article
Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor
by Abdullah S. Algamili, Mohd Haris Khir, Abdelaziz Y. Ahmed, Almur A. Rabih, Saeed S. Ba-Hashwan, Sami S. Alabsi, Osamah L. Al-Mahdi, Usman B. Isyaku, Mawahib G. Ahmed and Muhammad Junaid
Micromachines 2022, 13(4), 525; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13040525 - 26 Mar 2022
Cited by 6 | Viewed by 3910
Abstract
This work describes the fabrication and characterization of a Micro-Electro-Mechanical System (MEMS) sensor for gas sensing applications. The sensor is based on standard PolyMUMPs (Polysilicon Multi-Users MEMS Process) technology to control the temperature over the sensing layer. Due to its compact size and [...] Read more.
This work describes the fabrication and characterization of a Micro-Electro-Mechanical System (MEMS) sensor for gas sensing applications. The sensor is based on standard PolyMUMPs (Polysilicon Multi-Users MEMS Process) technology to control the temperature over the sensing layer. Due to its compact size and low power consumption, micro-structures enable a well-designed gas-sensing-layer interaction, resulting in higher sensitivity compared to the ordinary materials. The aim of conducting the characterization is to compare the measured and calculated resistance values of the micro-heater and the temperature sensor. The temperature coefficient of resistance (TCR) of the temperature sensor has been estimated by raising and dropping the temperature throughout a 25–110 °C range. The sensitivity of these sensors is dependent on the TCR value. The temperature sensor resistance was observed to rise alongside the rising environmental temperatures or increasing voltages given to the micro-heater, with a correlation value of 0.99. When compared to the TCR reported in the literature for the gold material 0.0034 °C−1, the average TCR was determined to be 0.00325 °C−1 and 0.0035 °C−1, respectively, indicating inaccuracies of 4.6% and 2.9%, respectively. The variation between observed and reported values is assumed to be caused by the fabrication tolerances of the design dimensions or material characteristics. Full article
(This article belongs to the Special Issue MEMS Devices for Nanomanufacturing)
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19 pages, 6424 KiB  
Article
Research on the Shearer Positioning Method Based on the MEMS Inertial Sensors/Odometer Integrated Navigation System and RTS Smoother
by Jiangtao Zheng, Sihai Li, Shiming Liu, Bofan Guan, Dong Wei and Qiangwen Fu
Micromachines 2021, 12(12), 1527; https://0-doi-org.brum.beds.ac.uk/10.3390/mi12121527 - 08 Dec 2021
Cited by 4 | Viewed by 1893
Abstract
The shearer positioning method with an inertial measurement unit and the odometer is feasible in the longwall coal-mining process. However, the positioning accuracy will continue to decrease, especially for the micro-electromechanical inertial measurement unit (MIMU). In order to further improve the positioning accuracy [...] Read more.
The shearer positioning method with an inertial measurement unit and the odometer is feasible in the longwall coal-mining process. However, the positioning accuracy will continue to decrease, especially for the micro-electromechanical inertial measurement unit (MIMU). In order to further improve the positioning accuracy of the shearer without adding other external sensors, the positioning method of the Rauch-Tung-Striebel (RTS) smoother-aided MIMU and odometer is proposed. A Kalman filter (KF) with the velocity and position measurements, which are provided by the odometer and closing path optimal estimation model (CPOEM), respectively, is established. The observability analysis is discussed to study the possible conditions under which the error states of KF can be estimated. A RTS smoother with the above-mentioned KF as the forward filter is built. Finally, the experiments of simulating the movement of the shearer through a mobile carrier were carried out, with a longitudinal movement distance of 44.6 m and a lateral advance distance of 1.2 m. The results show that the proposed method can effectively improve the positioning accuracy. In addition, the odometer scale factor and mounting angles can be estimated in real time. Full article
(This article belongs to the Special Issue MEMS Devices for Nanomanufacturing)
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16 pages, 3712 KiB  
Article
Theoretical and Experimental Studies on MEMS Variable Cross-Section Cantilever Beam Based Piezoelectric Vibration Energy Harvester
by Xianming He, Dongxiao Li, Hong Zhou, Xindan Hui and Xiaojing Mu
Micromachines 2021, 12(7), 772; https://0-doi-org.brum.beds.ac.uk/10.3390/mi12070772 - 30 Jun 2021
Cited by 8 | Viewed by 3179
Abstract
The piezoelectric vibration energy harvester (PVEH) based on the variable cross-section cantilever beam (VCSCB) structure has the advantages of uniform axial strain distribution and high output power density, so it has become a research hotspot of the PVEH. However, its electromechanical model needs [...] Read more.
The piezoelectric vibration energy harvester (PVEH) based on the variable cross-section cantilever beam (VCSCB) structure has the advantages of uniform axial strain distribution and high output power density, so it has become a research hotspot of the PVEH. However, its electromechanical model needs to be further studied. In this paper, the bidirectional coupled distributed parameter electromechanical model of the MEMS VCSCB based PVEH is constructed, analytically solved, and verified, which laid an important theoretical foundation for structural design and optimization, performance improvement, and output prediction of the PVEH. Based on the constructed model, the output performances of five kinds of VCSCB based PVEHs with different cross-sectional shapes were compared and analyzed. The results show that the PVEH with the concave quadratic beam shape has the best output due to the uniform surface stress distribution. Additionally, the influence of the main structural parameters of the MEMS trapezoidal cantilever beam (TCB) based PVEH on the output performance of the device is theoretically analyzed. Finally, a prototype of the Aluminum Nitride (AlN) TCB based PVEH is designed and developed. The peak open-circuit voltage and normalized power density of the device can reach 5.64 V and 742 μW/cm3/g2, which is in good agreement with the theoretical model value. The prototype has wide application prospects in the power supply of the wireless sensor network node such as the structural health monitoring system and the Internet of Things. Full article
(This article belongs to the Special Issue MEMS Devices for Nanomanufacturing)
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19 pages, 6988 KiB  
Article
Estimation and Analysis of Higher-Order Harmonics in Advanced Integrated Circuits to Implement Noise-Free Future-Generation Micro- and Nanoelectromechanical Systems
by Muhammad Imran Khan, Ahmed S. Alshammari, Badr M. Alshammari and Ahmed A. Alzamil
Micromachines 2021, 12(5), 541; https://0-doi-org.brum.beds.ac.uk/10.3390/mi12050541 - 10 May 2021
Cited by 4 | Viewed by 2428
Abstract
This work deals with the analysis of spectrum generation from advanced integrated circuits in order to better understand how to suppress the generation of high harmonics, especially in a given frequency band, to design and implement noise-free systems. At higher frequencies, the spectral [...] Read more.
This work deals with the analysis of spectrum generation from advanced integrated circuits in order to better understand how to suppress the generation of high harmonics, especially in a given frequency band, to design and implement noise-free systems. At higher frequencies, the spectral components of signals with sharp edges contain more energy. However, current closed-form expressions have become increasingly unwieldy to compute higher-order harmonics. The study of spectrum generation provides an insight into suppressing higher-order harmonics (10th order and above), especially in a given frequency band. In this work, we discussed the influence of transistor model quality and input signal on estimates of the harmonic contents of switching waveforms. Accurate estimates of harmonic contents are essential in the design of highly integrated micro- and nanoelectromechanical systems. This paper provides a comparative analysis of various flip-flop/latch topologies on different process technologies, i.e., 130 and 65 nm. An FFT plot of the simulated results signifies that the steeper the spectrum roll-off, the lesser the content of higher-order harmonics. Furthermore, the results of the comparison illustrate the improvement in the rise time, fall time, clock-Q delay and spectrum roll-off on the better selection of slow-changing input signals and more accurate transistor models. Full article
(This article belongs to the Special Issue MEMS Devices for Nanomanufacturing)
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10 pages, 4254 KiB  
Article
Design and Fabrication of a MEMS Electromagnetic Swing-Type Actuator for Optical Switch
by Shuhai Jia, Jun Peng, Jiaming Bian, Shuo Zhang, Shunjian Xu and Bao Zhang
Micromachines 2021, 12(2), 221; https://0-doi-org.brum.beds.ac.uk/10.3390/mi12020221 - 22 Feb 2021
Cited by 11 | Viewed by 2776
Abstract
A microelectromechanical systems system (MEMS) electromagnetic swing-type actuator is proposed for an optical fiber switch in this paper. The actuator has a compact size of 5.1 × 5.1 × 5.3 mm3, consisting of two stators, a swing disc (rotator), a rotating [...] Read more.
A microelectromechanical systems system (MEMS) electromagnetic swing-type actuator is proposed for an optical fiber switch in this paper. The actuator has a compact size of 5.1 × 5.1 × 5.3 mm3, consisting of two stators, a swing disc (rotator), a rotating shaft, and protective covers. Multi-winding stators and a multipole rotator were adopted to increase the output torque of the actuator. The actuator’s working principle and magnetic circuit were analyzed. The calculation results show that the actuator’s output torque is decisive to the air gap’s magnetic flux density between the stators and the swing disc. NiFe alloy magnetic cores were embedded into each winding center to increase the magnetic flux density. A special manufacturing process was developed for fabricating the stator windings on the ferrite substrate. Six copper windings and NiFe magnetic cores were electroplated onto the ferrite substrates. The corresponding six magnetic poles were configured to the SmCo permanent magnet on the swing disc. A magnetizing device with a particular size was designed and fabricated to magnetize the permanent magnet of the swing disc. The actuator prototype was fabricated, and the performance was tested. The results show that the actuator has a large output torque (40 μNm), fast response (5 ms), and a large swing angle (22°). Full article
(This article belongs to the Special Issue MEMS Devices for Nanomanufacturing)
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Review

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37 pages, 12666 KiB  
Review
Towards Repeatable, Scalable Graphene Integrated Micro-Nano Electromechanical Systems (MEMS/NEMS)
by Joon Hyong Cho, David Cayll, Dipankar Behera and Michael Cullinan
Micromachines 2022, 13(1), 27; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13010027 - 26 Dec 2021
Cited by 7 | Viewed by 3663
Abstract
The demand for graphene-based devices is rapidly growing but there are significant challenges for developing scalable and repeatable processes for the manufacturing of graphene devices. Basic research on understanding and controlling growth mechanisms have recently enabled various mass production approaches over the past [...] Read more.
The demand for graphene-based devices is rapidly growing but there are significant challenges for developing scalable and repeatable processes for the manufacturing of graphene devices. Basic research on understanding and controlling growth mechanisms have recently enabled various mass production approaches over the past decade. However, the integration of graphene with Micro-Nano Electromechanical Systems (MEMS/NEMS) has been especially challenging due to performance sensitivities of these systems to the production process. Therefore, ability to produce graphene-based devices on a large scale with high repeatability is still a major barrier to the commercialization of graphene. In this review article, we discuss the merits of integrating graphene into Micro-Nano Electromechanical Systems, current approaches for the mass production of graphene integrated devices, and propose solutions to overcome current manufacturing limits for the scalable and repeatable production of integrated graphene-based devices. Full article
(This article belongs to the Special Issue MEMS Devices for Nanomanufacturing)
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34 pages, 8107 KiB  
Review
Microfluidic Synthesis, Control, and Sensing of Magnetic Nanoparticles: A Review
by Roozbeh Abedini-Nassab, Mahrad Pouryosef Miandoab and Merivan Şaşmaz
Micromachines 2021, 12(7), 768; https://0-doi-org.brum.beds.ac.uk/10.3390/mi12070768 - 29 Jun 2021
Cited by 47 | Viewed by 6954
Abstract
Magnetic nanoparticles have attracted significant attention in various disciplines, including engineering and medicine. Microfluidic chips and lab-on-a-chip devices, with precise control over small volumes of fluids and tiny particles, are appropriate tools for the synthesis, manipulation, and evaluation of nanoparticles. Moreover, the controllability [...] Read more.
Magnetic nanoparticles have attracted significant attention in various disciplines, including engineering and medicine. Microfluidic chips and lab-on-a-chip devices, with precise control over small volumes of fluids and tiny particles, are appropriate tools for the synthesis, manipulation, and evaluation of nanoparticles. Moreover, the controllability and automation offered by the microfluidic chips in combination with the unique capabilities of the magnetic nanoparticles and their ability to be remotely controlled and detected, have recently provided tremendous advances in biotechnology. In particular, microfluidic chips with magnetic nanoparticles serve as sensitive, high throughput, and portable devices for contactless detecting and manipulating DNAs, RNAs, living cells, and viruses. In this work, we review recent fundamental advances in the field with a focus on biomedical applications. First, we study novel microfluidic-based methods in synthesizing magnetic nanoparticles as well as microparticles encapsulating them. We review both continues-flow and droplet-based microreactors, including the ones based on the cross-flow, co-flow, and flow-focusing methods. Then, we investigate the microfluidic-based methods for manipulating tiny magnetic particles. These manipulation techniques include the ones based on external magnets, embedded micro-coils, and magnetic thin films. Finally, we review techniques invented for the detection and magnetic measurement of magnetic nanoparticles and magnetically labeled bioparticles. We include the advances in anisotropic magnetoresistive, giant magnetoresistive, tunneling magnetoresistive, and magnetorelaxometry sensors. Overall, this review covers a wide range of the field uniquely and provides essential information for designing “lab-on-a-chip” systems for synthesizing magnetic nanoparticles, labeling bioparticles with them, and sorting and detecting them on a single chip. Full article
(This article belongs to the Special Issue MEMS Devices for Nanomanufacturing)
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