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12 pages, 5207 KiB

Open AccessArticle

Design of a Double-Layer Electrothermal MEMS Safety and Arming Device with a Bistable Mechanism

by Kexin Wang, Tengjiang Hu, Yulong Zhao, Wei Ren and Jiakai Liu

Micromachines 2022, 13(7), 1076; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13071076 - 07 Jul 2022

Cited by 3 | Viewed by 1363

Considering the safety of ammunition, safety and arming (S&A) devices are usually designed in pyrotechnics to control energy transfer through a movable barrier mechanism. To achieve both intelligence and miniaturization, electrothermal actuators are used in MEMS S&A devices, which can drive the barrier [...] Read more.

Considering the safety of ammunition, safety and arming (S&A) devices are usually designed in pyrotechnics to control energy transfer through a movable barrier mechanism. To achieve both intelligence and miniaturization, electrothermal actuators are used in MEMS S&A devices, which can drive the barrier to an arming position actively. However, only when the actuators’ energy input is continuous can the barrier be stably kept in the arming position to wait for ignition. Here, we propose the design and characterization of a double-layer electrothermal MEMS S&A Device with a bistable mechanism. The S&A device has a double-layer structure and four groups of bistable mechanisms. Each bistable mechanism consists of two V-shape electrothermal actuators to drive a semi-circular barrier and a pawl, respectively, and control their engagement according to a specific operation sequence. Then, the barrier can be kept in the safety or the arming position without energy input. To improve the device’s reliability, the four groups of bistable mechanisms are axisymmetrically placed in two layers to constitute a double-layer barrier structure. The test results show that the S&A device can use constant-voltage driving or the capacitor–discharge driving to drive the double-layer barrier to the safety or the arming position and keep it on the position passively by the bistable mechanism. Full article

(This article belongs to the Special Issue MEMS/NEMS Sensors and Actuators)

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11 pages, 4400 KiB

Open AccessArticle

Design of a Capacitive MEMS Accelerometer with Softened Beams

by Chenggang Wang, Yongcun Hao, Zheng Sun, Luhan Zu, Weizheng Yuan and Honglong Chang

Micromachines 2022, 13(3), 459; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13030459 - 17 Mar 2022

Cited by 8 | Viewed by 3340

Abstract

Lower stiffness can improve the performance of capacitive-based microelectromechanical systems sensors. In this paper, softened beams, achieved by the electrostatic assembly approach, are proposed to lower the stiffness of a capacitive MEMS accelerometer. The experiments show that the stiffness of the accelerometer is [...] Read more.

Lower stiffness can improve the performance of capacitive-based microelectromechanical systems sensors. In this paper, softened beams, achieved by the electrostatic assembly approach, are proposed to lower the stiffness of a capacitive MEMS accelerometer. The experiments show that the stiffness of the accelerometer is reduced by 43% with softened beams and the sensitivity is increased by 72.6%. As a result, the noise of the accelerometer is reduced to 26.2 μg/√Hz with an improvement of 44.5%, and bias instability is reduced to 5.05 μg with an enhancement of 38.7%. The electrostatic assembly-based stiffness softening technique is proven to be effective and can be used in many types of MEMS devices. Full article

(This article belongs to the Special Issue MEMS/NEMS Sensors and Actuators)

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12 pages, 4667 KiB

Open AccessArticle

Defects Produced during Wet Transfer Affect the Electrical Properties of Graphene

by Dongliang Zhang, Qi Zhang, Xiaoya Liang, Xing Pang and Yulong Zhao

Micromachines 2022, 13(2), 227; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13020227 - 29 Jan 2022

Cited by 5 | Viewed by 2394

Abstract

Graphene has been widely used due to its excellent electrical, mechanical and chemical properties. Defects produced during its transfer process will seriously affect the performance of graphene devices. In this paper, single-layer graphene was transferred onto glass and silicon dioxide (SiO₂) [...] Read more.

Graphene has been widely used due to its excellent electrical, mechanical and chemical properties. Defects produced during its transfer process will seriously affect the performance of graphene devices. In this paper, single-layer graphene was transferred onto glass and silicon dioxide (SiO₂) substrates by wet transfer technology, and the square resistances thereof were tested. Due to the different binding forces of the transferred graphene surfaces, there may have been pollutants present. PMMA residues, graphene laminations and other defects that occurred in the wet transfer process were analyzed by X-ray photoelectron spectroscopy and Raman spectroscopy. These defects influenced the square resistance of the produced graphene films, and of these defects, PMMA residue was the most influential; square resistance increased with increasing PMMA residue. Full article

(This article belongs to the Special Issue MEMS/NEMS Sensors and Actuators)

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15 pages, 5587 KiB

Open AccessArticle

Design and Simulation of Flexible Underwater Acoustic Sensor Based on 3D Buckling Structure

by Guochang Liu, Wenping Cao, Guojun Zhang, Zhihao Wang, Haoyu Tan, Jinwei Miao, Zhaodong Li, Wendong Zhang and Renxin Wang

Micromachines 2021, 12(12), 1536; https://0-doi-org.brum.beds.ac.uk/10.3390/mi12121536 - 10 Dec 2021

Cited by 5 | Viewed by 2344

Abstract

The exploration of marine resources has become an essential part of the development of marine strategies of various countries. MEMS vector hydrophone has great application value in the exploration of marine resources. However, existing MEMS vector hydrophones have a narrow frequency bandwidth and [...] Read more.

The exploration of marine resources has become an essential part of the development of marine strategies of various countries. MEMS vector hydrophone has great application value in the exploration of marine resources. However, existing MEMS vector hydrophones have a narrow frequency bandwidth and are based on rigid substrates, which are not easy to be bent in the array of underwater robots. This paper introduces a new type of flexible buckling crossbeam–cilium flexible MEMS vector hydrophone, arranged on a curved surface by a flexible substrate. A hydrophone model in the fluid domain was established by COMSOL Multiphysics software. A flexible hydrophone with a bandwidth of 20~4992 Hz, a sensitivity of −193.7 dB, excellent “8” character directivity, and a depth of concave point of 41.5 dB was obtained through structured data optimization. This study plays a guiding role in the manufacture and application of flexible hydrophones and sheds light on a new way of marine exploration. Full article

(This article belongs to the Special Issue MEMS/NEMS Sensors and Actuators)

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13 pages, 3240 KiB

Open AccessArticle

Application and Analysis of Discrete Fiber Probes in Determining Detonation Velocity of Microcharges

by Guodong Zhang, Yulong Zhao and Jing Sun

Micromachines 2021, 12(12), 1524; https://0-doi-org.brum.beds.ac.uk/10.3390/mi12121524 - 08 Dec 2021

Cited by 1 | Viewed by 1760

Abstract

This paper describes a method based on discrete fiber probes for measuring detonation velocity produced by microcharges. This method is simple to implement, scalable for multi-channel and requires minimal perturbation to the detonation wave. A simple experimental apparatus was established by using the [...] Read more.

This paper describes a method based on discrete fiber probes for measuring detonation velocity produced by microcharges. This method is simple to implement, scalable for multi-channel and requires minimal perturbation to the detonation wave. A simple experimental apparatus was established by using the oscilloscope, photodetectors, optical fibers, alignment device and initiation system. Four groups of experiments were carried out for analyzing the influence of probe spacing on detonation velocity. The experiment results suggest that a relatively appropriate distance between two adjacent fiber probes is 4 mm. In addition, the comparative experiments between ionization probes and fiber probes were performed, which shows that the standard deviation of detonation velocity obtained by fiber probes is smaller under the same measurement conditions. This research may be useful for the development of determining detonation velocity precisely of microcharges. Full article

(This article belongs to the Special Issue MEMS/NEMS Sensors and Actuators)

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13 pages, 3625 KiB

Open AccessArticle

High-Sensitivity Enzymatic Glucose Sensor Based on ZnO Urchin-like Nanostructure Modified with Fe₃O₄ Magnetic Particles

by Qi Mao, Weixuan Jing, Weizhuo Gao, Zhengying Wei, Bian Tian, Ming Liu, Wei Ren and Zhuangde Jiang

Micromachines 2021, 12(8), 977; https://0-doi-org.brum.beds.ac.uk/10.3390/mi12080977 - 18 Aug 2021

Cited by 11 | Viewed by 2383

Abstract

A novel and efficient enzymatic glucose sensor was fabricated based on Fe₃O₄ magnetic nanoparticles (Fe₃O₄MNPs)-modified urchin-like ZnO nanoflowers (ZnONFs). ZnONFs were hydrothermally synthesizing on a flexible PET substrate. Fe₃O₄MNPs were deposited on [...] Read more.

A novel and efficient enzymatic glucose sensor was fabricated based on Fe₃O₄ magnetic nanoparticles (Fe₃O₄MNPs)-modified urchin-like ZnO nanoflowers (ZnONFs). ZnONFs were hydrothermally synthesizing on a flexible PET substrate. Fe₃O₄MNPs were deposited on the surface of the ZnONFs by the drop-coating process. The results showed that the urchin-like ZnONFs provided strong support for enzyme adsorption. For Fe₃O₄MNPs, it significantly promoted the redox electron transfer from the active center of GOx to the ZnO nanoflowers beneath. More importantly, it promoted the hydrolysis of H₂O₂, the intermediate product of glucose catalytic reaction, and thus improved the electron yield. The sensitivity of the Nafion/GOx/Fe₃O₄MNPs/ZnONFs/Au/PET sensor was up to 4.52 μA·mM⁻¹·cm⁻², which was improved by 7.93 times more than the Nafion/GOx/ZnONFs/Au/PET sensors (0.57 μA·mM⁻¹·cm⁻²). The detection limit and linear range were also improved. Additionally, the as-fabricated glucose sensors show strong anti-interference performance in the test environment containing organic compounds (such as urea, uric acid, and ascorbic acid) and inorganic salt (for instance, NaCl and KCl). The glucose sensor’s service life was evaluated, and it can still maintain about 80% detection performance when it was reused about 20 times. Compared with other existing sensors, the as-fabricated glucose sensor exhibits an ultrahigh sensitivity and wide detection range. In addition, the introduction of Fe₃O₄MNPs optimized the catalytic efficiency from the perspective of the reaction mechanism and provided potential ideas for improving the performance of other enzymatic biosensors. Full article

(This article belongs to the Special Issue MEMS/NEMS Sensors and Actuators)

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10 pages, 3383 KiB

Open AccessArticle

High-Performance Temperature Sensor by Employing Screen Printing Technology

by Zhaojun Liu, Bian Tian, Bingfei Zhang, Zhongkai Zhang, Jiangjiang Liu, Libo Zhao, Peng Shi, Qijing Lin and Zhuangde Jiang

Micromachines 2021, 12(8), 924; https://0-doi-org.brum.beds.ac.uk/10.3390/mi12080924 - 02 Aug 2021

Cited by 9 | Viewed by 2634

Abstract

In the present study, a high-performance n-type temperature sensor was developed by a new and facile synthesis approach, which could apply to ambient temperature applications. As impacted by the low sintering temperature of flexible polyimide substrates, a screen printing technology-based method to prepare [...] Read more.

In the present study, a high-performance n-type temperature sensor was developed by a new and facile synthesis approach, which could apply to ambient temperature applications. As impacted by the low sintering temperature of flexible polyimide substrates, a screen printing technology-based method to prepare thermoelectric materials and a low-temperature heat treatment process applying to polymer substrates were proposed and achieved. By regulating the preparation parameters of the high-performance n-type indium oxide material, the optimal proportioning method and the post-treatment process method were developed. The sensors based on thermoelectric effects exhibited a sensitivity of 162.5 μV/°C, as well as a wide range of temperature measurement from ambient temperature to 223.6 °C. Furthermore, it is expected to conduct temperature monitoring in different scenarios through a sensor prepared in masks and mechanical hands, laying a foundation for the large-scale manufacturing and widespread application of flexible electronic skin and devices. Full article

(This article belongs to the Special Issue MEMS/NEMS Sensors and Actuators)

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20 pages, 13167 KiB

Open AccessFeature PaperEditor’s ChoiceArticle

Microfluidic Airborne Metal Particle Sensor Using Oil Microcirculation for Real-Time and Continuous Monitoring of Metal Particle Emission

by Jong-Seo Yoon, Jiwon Park, Hye-Rin Ahn, Seong-Jae Yoo and Yong-Jun Kim

Micromachines 2021, 12(7), 825; https://0-doi-org.brum.beds.ac.uk/10.3390/mi12070825 - 14 Jul 2021

Cited by 4 | Viewed by 2705

Abstract

Airborne metal particles (MPs; particle size > 10 μm) in workplaces result in a loss in production yield if not detected in time. The demand for compact and cost-efficient MP sensors to monitor airborne MP generation is increasing. However, contemporary instruments and laboratory-grade [...] Read more.

Airborne metal particles (MPs; particle size > 10 μm) in workplaces result in a loss in production yield if not detected in time. The demand for compact and cost-efficient MP sensors to monitor airborne MP generation is increasing. However, contemporary instruments and laboratory-grade sensors exhibit certain limitations in real-time and on-site monitoring of airborne MPs. This paper presents a microfluidic MP detection chip to address these limitations. By combining the proposed system with microcirculation-based particle-to-liquid collection and a capacitive sensing method, the continuous detection of airborne MPs can be achieved. A few microfabrication processes were realized, resulting in a compact system, which can be easily replaced after contamination with a low-priced microfluidic chip. In our experiments, the frequency-dependent capacitive changes were characterized using MP (aluminum) samples (sizes ranging from 10 μm to 40 μm). Performance evaluation of the proposed system under test-bed conditions indicated that it is capable of real-time and continuous monitoring of airborne MPs (minimum size 10 μm) under an optimal frequency, with superior sensitivity and responsivity. Therefore, the proposed system can be used as an on-site MP sensor for unexpected airborne MP generation in precise manufacturing facilities where metal sources are used. Full article

(This article belongs to the Special Issue MEMS/NEMS Sensors and Actuators)

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7 pages, 1731 KiB

Open AccessArticle

Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor

by Dongpeng Zhang, Anjiang Cai, Yulong Zhao and Tengjiang Hu

Micromachines 2021, 12(6), 622; https://0-doi-org.brum.beds.ac.uk/10.3390/mi12060622 - 27 May 2021

Cited by 6 | Viewed by 2447

Abstract

The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the [...] Read more.

The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the MEMS actuator model by using the BP neural network, which effectively reduces the error between ANSYS simulation results and experimental results to less than 1%. Meanwhile, the V-shaped electro-thermal MEMS actuator model, with the human error factor included, will become more accurate as the database of the V-shaped electro-thermal actuator model grows. Full article

(This article belongs to the Special Issue MEMS/NEMS Sensors and Actuators)

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Review

Jump to: Research

28 pages, 12747 KiB

Open AccessReview

A Genosensor Based on the Modification of a Microcantilever: A Review

by He Zhang, Shuang Yang, Jian Zeng, Xin Li and Rongyan Chuai

Micromachines 2023, 14(2), 427; https://0-doi-org.brum.beds.ac.uk/10.3390/mi14020427 - 10 Feb 2023

Cited by 3 | Viewed by 1695

Abstract

When the free end of a microcantilever is modified by a genetic probe, this sensor can be used for a wider range of applications, such as for chemical analysis, biological testing, pharmaceutical screening, and environmental monitoring. In this paper, to clarify the preparation [...] Read more.

When the free end of a microcantilever is modified by a genetic probe, this sensor can be used for a wider range of applications, such as for chemical analysis, biological testing, pharmaceutical screening, and environmental monitoring. In this paper, to clarify the preparation and detection process of a microcantilever sensor with genetic probe modification, the core procedures, such as probe immobilization, complementary hybridization, and signal extraction and processing, are combined and compared. Then, to reveal the microcantilever’s detection mechanism and analysis, the influencing factors of testing results, the theoretical research, including the deflection principle, the establishment and verification of a detection model, as well as environmental influencing factors are summarized. Next, to demonstrate the application results of the genetic-probe-modified sensors, based on the classification of detection targets, the application status of other substances except nucleic acid, virus, bacteria and cells is not introduced. Finally, by enumerating the application results of a genetic-probe-modified microcantilever combined with a microfluidic chip, the future development direction of this technology is surveyed. It is hoped that this review will contribute to the future design of a genetic-probe-modified microcantilever, with further exploration of the sensitive mechanism, optimization of the design and processing methods, expansion of the application fields, and promotion of practical application. Full article

(This article belongs to the Special Issue MEMS/NEMS Sensors and Actuators)

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