Search for Articles:
Title / Keyword
Author / Affiliation / Email
Journal
Article Type
 
 
Advanced Search
 
Section
Special Issue
Volume
Issue
Number
Page
 
4.7
3.4
Journals
Micromachines
Special Issues
Micro/Nano Resonators, Actuators, and Their Applications
share announcement

Micro/Nano Resonators, Actuators, and Their Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (31 October 2022) | Viewed by 36779

Special Issue Editors

Prof. Dr. Hongping Hu

E-Mail Website
Guest Editor
School of Aerospace Engineering, Huazhong University of Science and Technology, Wuhan 430030, China
Interests: piezoelectric structures and devices; phoxonic crystals and acousto-optic coupling
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Pei-Hsun Wang

E-Mail Website
Guest Editor
Department of Optics and Photonics, National Central University, Taoyuan City 32001, Taiwan
Interests: silicon photonics; semiconductor fabrication; microresonator; frequency comb; ultrafast optics; process integration
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Zhenghua Qian

E-Mail Website
Guest Editor
College of Aerospace Engineering, State Key Laboratory of Mechanics and Control of, Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing, China
Interests: piezoelectric acoustic devices (QR, FBAR); ultrasonic nondestructive evaluation; boundary element method; machine learning; phononic crystal; wave propagation in complex materials and structures

Special Issue Information

Dear Colleagues,

The resonator is the core component of sensors, oscillators, filters, modulators, and other devices. Resonators are being developed for use at high frequencies and at the micro/nano scale. This introduces many challenges such as scale effects, nonlinearity, temperature stability, high quality factors, and acceleration sensitivity. Therefore, for both resonators of surface wave and bulk acoustic waves, it is necessary to establish new physical models and to put forward effective solutions to the aforementioned challenges. New fabrication techniques, materials, and testing methods are also needed to improve the performance of resonators.

With the development of devices such as small uAVs, robots, and nano precision manufacturing equipment, actuators need to meet the requirements of higher speed, greater driving force, and higher accuracy by overcoming the challenges of large contact force, motion stability, suppression of backward motion, etc. In addition, micro/nano resonators have also been widely applied in the integration platform, especially in optical communication, while the build-up intracavity power of a high-Q resonator leads the way in realizing novel nonlinear and quantum photonics. The goal of this Special Issue is to seek innovative solutions that take advantage of unique material properties and original designs to push the performance of actuators and micro/nano resonators beyond what is conventionally achievable.

Prof. Dr. Hongping Hu
Prof. Dr. Pei-Hsun Wang
Prof. Dr. Zhenghua Qian
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • scale effect
  • nonlinearity
  • temperature stability
  • acceleration sensitivity
  • high speed
  • great driving force
  • high accuracy
  • high quality factor
  • integrated photonics
  • quantum photonics

Related Special Issue

Published Papers (20 papers)

Download All Papers
Order results
Result details
Show export options expand_more Show export options expand_less
Select all
Export citation of selected articles as:

Research

Jump to: Review, Other

15 pages, 4343 KiB  
Article
Design of a Compact Quad-Channel Microstrip Diplexer for L and S Band Applications
by Sobhan Roshani, Salah I. Yahya, Yaqeen Sabah Mezaal, Muhammad Akmal Chaudhary, Aqeel A. Al-Hilali, Afshin Mojirleilani and Saeed Roshani
Micromachines 2023, 14(3), 553; https://0-doi-org.brum.beds.ac.uk/10.3390/mi14030553 - 26 Feb 2023
Cited by 10 | Viewed by 1707
Abstract
In this paper, two novel dual-band bandpass filters (BPFs) and a compact quad-channel diplexer working at 1.7/3.3 GHz and 1.9/3.6 GHz are proposed. In the proposed diplexer design, triangular loop resonators and rectangular loop resonators are used together to reduce the circuit size [...] Read more.
In this paper, two novel dual-band bandpass filters (BPFs) and a compact quad-channel diplexer working at 1.7/3.3 GHz and 1.9/3.6 GHz are proposed. In the proposed diplexer design, triangular loop resonators and rectangular loop resonators are used together to reduce the circuit size and improve diplexer performances. Insertion loss (IL) and return loss (RL) of the proposed diplexer are better than 0.8 dB and 21 dB, respectively, at these four operating frequencies. Output ports isolation parameter is better than 30 dB. With the achieved specifications, the proposed diplexer can be used in L and S band applications. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

11 pages, 3606 KiB  
Article
Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators
by Yuan Han, Yongqiu Zheng, Nan Li, Yifan Luo, Chenyang Xue, Jiandong Bai and Jiamin Chen
Micromachines 2023, 14(3), 512; https://0-doi-org.brum.beds.ac.uk/10.3390/mi14030512 - 22 Feb 2023
Cited by 2 | Viewed by 1093
Abstract
Acoustic detection based on optical technology has moved in the direction of high sensitivity and resolution. In this study, an optical waveguide acoustic sensor based on a ring resonator with the evanescent field is proposed. Grooves are introduced into the ring resonators as [...] Read more.
Acoustic detection based on optical technology has moved in the direction of high sensitivity and resolution. In this study, an optical waveguide acoustic sensor based on a ring resonator with the evanescent field is proposed. Grooves are introduced into the ring resonators as a direct sensitive structure to excite the evanescent field. A series of resonators with diverse grooves are fabricated for a comparative analysis of acoustic performance. The acoustic parameters of bandwidth, sensitivity, and signal-to-noise ratio (SNR) vary with different grooves indicated by the Q-factor. The results show that the ring resonators with variable-sized grooves exhibit excellent capability of acoustics detection. A maximum frequency of 160 kHz and a high sensitivity of 60.075 mV/Pa is achieved, with the minimum detectable sound pressure being 131.34 µPa/Hz1/2. Furthermore, the resonators with high Q-factors represent a remarkable sound resolution reaching 0.2 Hz. This work is of great significance for optimizing acoustic sensors and broadening the application range. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

13 pages, 4548 KiB  
Article
Design and Experimental Study of a Stepping Piezoelectric Actuator with Large Stroke and High Speed
by Qirui Duan, Yajun Zheng, Jun Jin, Ningdong Hu, Zenglei Zhang and Hongping Hu
Micromachines 2023, 14(2), 267; https://0-doi-org.brum.beds.ac.uk/10.3390/mi14020267 - 20 Jan 2023
Cited by 1 | Viewed by 1635
Abstract
A stepping piezoelectric actuator is proposed with large stroke and high speed. The piezoelectric actuator consists of two symmetrical stators and a mover. The actuator can operate with a “double-drive, four-clamp” mode. The proposed actuator solves the problems of short stroke, low speed, [...] Read more.
A stepping piezoelectric actuator is proposed with large stroke and high speed. The piezoelectric actuator consists of two symmetrical stators and a mover. The actuator can operate with a “double-drive, four-clamp” mode. The proposed actuator solves the problems of short stroke, low speed, and small load inherent in the currently published stepping piezoelectric actuators. By combining Workbench software with APDL language, finite element simulation and statics and dynamics analysis are carried out to guide the design of the actuator. The new piezoelectric simulation method can solve the difficulties regarding parameter setting and loading voltage on multiple interfaces for a complex piezoelectric model. Therefore, the novel method is helpful to develop the simulation of multilayer thin piezoelectric devices. The prototype of the actuator is developed and tested. Experimental results show that the actuator can run stably in the range of 0 to 600 Hz. The driving stroke is greater than 85 mm, the resolution can reach 535 nm, the maximum driving speed is 6.11 mm/s, and the maximum load is 49 N. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

15 pages, 2623 KiB  
Article
The Limit Tuning Effects Exerted by the Mechanically Induced Artificial Potential Barriers on the I–V Characteristics of Piezoelectric PN Junctions
by Yizhan Yang, Jiankang Chen and Yunbo Wang
Micromachines 2022, 13(12), 2103; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13122103 - 29 Nov 2022
Cited by 1 | Viewed by 1118
Abstract
A mechanically induced artificial potential barrier (MIAPB) in piezoelectric semiconductor devices is set up under the action of a pair of tensile/compressive mechanical loadings. Three factors, namely, the barrier height, width and position, affect the nature and extent of interaction between the MIAPB [...] Read more.
A mechanically induced artificial potential barrier (MIAPB) in piezoelectric semiconductor devices is set up under the action of a pair of tensile/compressive mechanical loadings. Three factors, namely, the barrier height, width and position, affect the nature and extent of interaction between the MIAPB and the contact barrier, and the tuning characteristics (generated under conditions of the artificial barrier) of the piezoelectric PN junctions were studied. The influence of these factors resulted in variations in the interaction intensities, superposition effects, carrier inversion degrees and carrier redistribution ranges. Subsequently, the limit tuning effects exerted by the tensile/compressive-mode MIAPB on the PN junctions were studied. The inconsistency between the left and right end of the tensile-mode MIAPB under conditions of the offset loading state proves that the maximum tuning effect is generated when both sides of the interface are symmetrically loaded. The range of carrier redistribution and the over-inversion of local carriers, affected by the width and height of MIAPB, result in a second competitive mechanism. The carrier redistribution range and the carrier inversion degree require that the compressive-mode MIAPB be sufficiently wide. The interaction intensities and the superposition effects, affected by the position and height of the MIAPB, contribute to the second competing mechanism. We logically clarify the relationship between multiple competition and find that the emergence of multiple competitive mechanisms proves the existence of the limit tuning effect of MIAPB on the I–V properties of PN junctions. The results reported herein provide a platform for understanding the mechanical tuning laws governing the functions of piezoelectric PN junctions and piezoelectric devices. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

17 pages, 3055 KiB  
Article
Thermally Driven Continuous Rolling of a Thick-Walled Cylindrical Rod
by Fayang Zhu, Changshen Du, Yuntong Dai and Kai Li
Micromachines 2022, 13(11), 2035; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13112035 - 21 Nov 2022
Viewed by 1280
Abstract
Self-sustained motion can take advantage of direct energy extraction from a steady external environment to maintain its own motion, and has potential applications in energy harvesting, robotic motion, and transportation. Recent experiments have found that a thermally responsive rod can perform self-sustained rolling [...] Read more.
Self-sustained motion can take advantage of direct energy extraction from a steady external environment to maintain its own motion, and has potential applications in energy harvesting, robotic motion, and transportation. Recent experiments have found that a thermally responsive rod can perform self-sustained rolling on a flat hot plate with an angular velocity determined by the competition between the thermal driving moment and the friction moment. A rod with a hollow cross section tends to greatly reduce the frictional resistance, while promising improvements in thermal conversion efficiency. In this paper, through deriving the equilibrium equations for steady-state self-sustained rolling of the thick-walled cylindrical rod, estimating the temperature field on the rod cross-section, and solving the analytical solution of the thermally induced driving moment, the dynamic behavior of the thermally driven self-sustained rolling of the thick-walled cylindrical rod is theoretically investigated. In addition, we investigate in detail the effects of radius ratio, heat transfer coefficient, heat flux, contact angle, thermal expansion coefficient, and sliding friction coefficient on the angular velocity of the self-sustained rolling of the thick-walled cylindrical rod to obtain the optimal ratio of internal and external radius. The results are instructive for the application of thick-walled cylindrical rods in the fields of waste heat harvesters and soft robotics. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

15 pages, 4610 KiB  
Article
A Convolutional Dynamic-Jerk-Planning Algorithm for Impedance Control of Variable-Stiffness Cable-Driven Manipulators
by Luyang Zhang, Lihui Jia, Panpan Yang, Zixuan Li, Yuhuan Zhang, Xiang Cheng and Zonggao Mu
Micromachines 2022, 13(11), 2021; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13112021 - 19 Nov 2022
Cited by 1 | Viewed by 1550
Abstract
Cable-driven manipulators, characterized by slender arms, dexterous motion, and controllable stiffness, have great prospects for application to capture on-orbit satellites. However, it is difficult to achieve effective motion planning and stiffness control of cable-driven manipulators because of the coupled relationships between cable lengths, [...] Read more.
Cable-driven manipulators, characterized by slender arms, dexterous motion, and controllable stiffness, have great prospects for application to capture on-orbit satellites. However, it is difficult to achieve effective motion planning and stiffness control of cable-driven manipulators because of the coupled relationships between cable lengths, joint angles, and reaction forces. Therefore, a convolutional dynamic-jerk-planning algorithm is devised for impedance control of variable-stiffness cable-driven manipulators. First, a variable-stiffness cable-driven manipulator with universal modules and rotary quick-change modules is designed to overcome difficulties related to disassembly, installation, and maintenance. Second, a convolutional dynamic-jerk-planning algorithm is devised to overcome the discontinuity and shock problems of the manipulator’s velocity during intermittent control processes. The algorithm can also make acceleration smooth by setting jerk dynamically, reducing acceleration shock and ensuring the stable movement of the cable-driven manipulator. Third, the stiffness of the cable-driven manipulator is further optimized by compensating for the position and velocity of drive cables by employing position-based impedance control. Finally, the prototype of the variable-stiffness cable-driven manipulator is developed and tested. The convolutional dynamic-jerk-planning algorithm is used to plan the desired velocity curves for velocity control experiments of the cable-driven manipulator. The results verify that the algorithm can improve the acceleration smoothness, thereby making movement smooth and reducing vibrations. Furthermore, stiffness control experiments verify that the cable-driven manipulator has ideal variable stiffness capabilities. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

11 pages, 3172 KiB  
Article
Design of GHz Mechanical Nanoresonator with High Q-Factor Based on Optomechanical System
by Jun Jin, Ningdong Hu, Lamin Zhan, Xiaohong Wang, Zenglei Zhang and Hongping Hu
Micromachines 2022, 13(11), 1862; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13111862 - 30 Oct 2022
Viewed by 1254
Abstract
Micro-electromechanical systems (MEMS) have dominated the interests of the industry due to its microminiaturization and high frequency for the past few decades. With the rapid development of various radio frequency (RF) systems, such as 5G mobile telecommunications, satellite, and other wireless communication, this [...] Read more.
Micro-electromechanical systems (MEMS) have dominated the interests of the industry due to its microminiaturization and high frequency for the past few decades. With the rapid development of various radio frequency (RF) systems, such as 5G mobile telecommunications, satellite, and other wireless communication, this research has focused on a high frequency resonator with high quality. However, the resonator based on an inverse piezoelectric effect has met with a bottleneck in high frequency because of the low quality factor. Here, we propose a resonator based on optomechanical interaction (i.e., acoustic-optic coupling). A picosecond laser can excite resonance by radiation pressure. The design idea and the optimization of the resonator are given. Finally, with comprehensive consideration of mechanical losses at room temperature, the resonator can reach a high Q-factor of 1.17 × 104 when operating at 5.69 GHz. This work provides a new concept in the design of NEMS mechanical resonators with a large frequency and high Q-factor. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

15 pages, 5786 KiB  
Article
Shear Horizontal Surface Waves in a Layered Piezoelectric Nanostructure with Surface Effects
by Lele Zhang, Jing Zhao and Guoquan Nie
Micromachines 2022, 13(10), 1711; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13101711 - 11 Oct 2022
Cited by 1 | Viewed by 954
Abstract
This work aims to provide a fundamental understanding on the dispersive behaviors of shear horizontal (SH) surface waves propagating in a layered piezoelectric nanostructure consisting of an elastic substrate and a piezoelectric nanofilm by considering the surface effects. Theoretical derivation based on the [...] Read more.
This work aims to provide a fundamental understanding on the dispersive behaviors of shear horizontal (SH) surface waves propagating in a layered piezoelectric nanostructure consisting of an elastic substrate and a piezoelectric nanofilm by considering the surface effects. Theoretical derivation based on the surface piezoelectricity model was conducted for this purpose, and analytic expressions of the dispersion equation under the nonclassical mechanical and electrical boundary conditions were obtained. Numerical solutions were given to investigate the influencing mechanism of surface elasticity, surface piezoelectricity, surface dielectricity, as well as the surface density upon the propagation characteristics of SH surface waves, respectively. The results also reveal the size-dependence of dispersive behaviors, which indicates that the surface effects make a difference only when the thickness of the piezoelectric nanofilm stays in a certain range. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

12 pages, 3420 KiB  
Article
Thermo-Optical Control of Raman Solitons in a Functionalized Silica Microsphere
by Elena A. Anashkina, Maria P. Marisova and Alexey V. Andrianov
Micromachines 2022, 13(10), 1616; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13101616 - 27 Sep 2022
Cited by 2 | Viewed by 1368
Abstract
The investigation of optical microcavity solitons is in demand both for applications and basic science. Despite the tremendous progress in the study of microresonator solitons, there is still no complete understanding of all features of their nonlinear dynamics in various regimes. Controlling soliton [...] Read more.
The investigation of optical microcavity solitons is in demand both for applications and basic science. Despite the tremendous progress in the study of microresonator solitons, there is still no complete understanding of all features of their nonlinear dynamics in various regimes. Controlling soliton properties is also of great interest. We proposed and investigated experimentally and theoretically a simple and easily reproducible way to generate Raman solitons with controllable spectral width in an anomalous dispersion region in a functionalized silica microsphere with whispering gallery modes (WGMs) driven in a normal dispersion regime. To functionalize the microsphere, coating (TiO2 + graphite powder) was applied at the pole. The coating is used for effective thermalization of the radiation of an auxiliary laser diode launched through the fiber stem holding the microsphere to control detuning of the pump frequency from exact resonance due to the thermo-optical shift of the WGM frequencies. We demonstrated that the thermo-optical control by changing the power of an auxiliary diode makes it possible to switch on/off the generation of Raman solitons and control their spectral width, as well as to switch Raman generation to multimode or single-mode. We also performed a detailed theoretical analysis based on the Raman-modified Lugiato–Lefever equation and explained peculiarities of intracavity nonlinear dynamics of Raman solitons. All experimental and numerically simulated results are in excellent agreement. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

9 pages, 2333 KiB  
Article
Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors
by Yilin Qu, Feng Jin and Jiashi Yang
Micromachines 2022, 13(8), 1243; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13081243 - 02 Aug 2022
Cited by 1 | Viewed by 1188
Abstract
We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical [...] Read more.
We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

14 pages, 5354 KiB  
Article
High-Frequency and Spectrum-Clean Shear-Horizontal Acoustic Wave Resonators with AlN Overlay
by Zonglin Wu, Shuxian Wu, Feihong Bao and Jie Zou
Micromachines 2022, 13(7), 1029; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13071029 - 29 Jun 2022
Viewed by 1524
Abstract
By bonding the sub-wavelength-thick lithium niobate (LiNbO3) layer to high-phase-velocity (vp) substrates, such as Si, the shear-horizontal (SH) modes no longer couple with the bulk modes leaking into substrates. As the propagation loss is no longer the major [...] Read more.
By bonding the sub-wavelength-thick lithium niobate (LiNbO3) layer to high-phase-velocity (vp) substrates, such as Si, the shear-horizontal (SH) modes no longer couple with the bulk modes leaking into substrates. As the propagation loss is no longer the major concern for these types of nonleaky SH wave devices, the YX-LiNbO3 with a low rotation angle providing ultra-large coupling coefficient (keff2) can be used. In addition, by overlaying a high-velocity layer such as AlN on top of LiNbO3/Si, the vp of the SH wave can be significantly enhanced at a small cost of keff2. By a careful design of the stack, both the wide-band spurious (Lamb wave) and near-band spurious (Rayleigh wave) are suppressed successfully. This paper focuses on the design of layered substrate not only to optimize its resonance characteristics—series frequency (fs), quality factor (Q), keff2, and temperature coefficient of frequency (TCF)—but also for eliminating the out-of-band spurious responses. The optimized substrate design demonstrates the minimal propagation loss, high fs of 3 GHz, large keff2 of 14.4% and a spurious-free response at 0–6 GHz. These novel nonleaky SH wave devices can potentially enable the low loss and wideband processing functions, which is promising for the 5G/6G radio frequency (RF) communication systems. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

10 pages, 2343 KiB  
Article
Sensitivity Enhancement of Group Refractive Index Biosensor through Ring-Down Interferograms of Microring Resonator
by Hsuan Lai, Tzu-Ning Kuo, Jia-Yi Xu, Shih-Hsiang Hsu and Yi-Cheng Hsu
Micromachines 2022, 13(6), 922; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13060922 - 10 Jun 2022
Cited by 2 | Viewed by 1681 | Correction
Abstract
In recent years, silicon-on-insulator substrates have been utilized for high-speed and low-power electronic components. Because of the high refractive index contrast of the silicon wire, its photonic device footprint can be significantly reduced. Moreover, the silicon photonic process is compatible with a complementary [...] Read more.
In recent years, silicon-on-insulator substrates have been utilized for high-speed and low-power electronic components. Because of the high refractive index contrast of the silicon wire, its photonic device footprint can be significantly reduced. Moreover, the silicon photonic process is compatible with a complementary metal-oxide-semiconductor fabrication, which will benefit the high-density optoelectronic integrated circuits development. Researchers have recently proposed using the microring resonator (MRR) for label-free biosensing applications. The high-quality factor caused by the substantial electric field enhancement within the ring makes the MRR a good candidate for biomolecule detection under low analyte concentration conditions. This paper proposes an MRR chip to be a biosensor on the silicon platform through the relative displacement between the spatial ring-down interferograms at various cladding layers. The higher-order ring-down of the spatial interference wave packet will enhance the biosensing sensitivity after optimizing the coupling, MRR length, and the optical source bandwidth at the fixed optical waveguide loss. Finally, a typical sensitivity of 642,000 nm per refractive index unit is demonstrated under 0.1 μW minimum optical power detection for an MRR with a 100 μm radius. Higher sensitivity can be executed by a narrow bandwidth and lower silicon wire propagation loss. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

12 pages, 1903 KiB  
Article
Interaction between Electromechanical Fields and Carriers in a Multilayered Piezoelectric Semiconductor Beam
by Renzhong Hong, Wanli Yang and Yunbo Wang
Micromachines 2022, 13(6), 857; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13060857 - 30 May 2022
Viewed by 1363
Abstract
This study discusses the interaction between electromechanical fields and carriers in a multilayered ZnO beam where the c-axis of every two adjacent layers is alternately opposite along the thickness direction. A multi-field coupling model is proposed from the Timoshenko beam theory together with [...] Read more.
This study discusses the interaction between electromechanical fields and carriers in a multilayered ZnO beam where the c-axis of every two adjacent layers is alternately opposite along the thickness direction. A multi-field coupling model is proposed from the Timoshenko beam theory together with the phenomenological theory of piezoelectric semiconductors, including Gauss’s law and the continuity equation of currents. The analytical solutions are obtained for a bent beam with different numbers of layers. Numerical results show that polarized charges occur at the interfaces between every two adjacent layers due to the opposite electromechanical coupling effects. It was found that a series of alternating potential-barrier/well structures are induced by the polarized charges, which can be used to forbid the passing of low-energy mobile charges. Moreover, it was also observed that the induced polarized charges could weaken the shielding effect of carrier redistribution. These results are useful for the design of piezotronic devices. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

11 pages, 3762 KiB  
Article
A THz Waveguide Bandpass Filter Design Using an Artificial Neural Network
by Chu-Hsuan Lin and Yu-Hsiang Cheng
Micromachines 2022, 13(6), 841; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13060841 - 27 May 2022
Cited by 3 | Viewed by 2089
Abstract
This paper presents a 300 GHz waveguide bandpass filter based on asymmetric inductive irises. The coupling matrix synthesis technique is used to design a 6-pole Chebyshev filter. In addition, an artificial neural network is applied to provide the filter geometries using the desired [...] Read more.
This paper presents a 300 GHz waveguide bandpass filter based on asymmetric inductive irises. The coupling matrix synthesis technique is used to design a 6-pole Chebyshev filter. In addition, an artificial neural network is applied to provide the filter geometries using the desired frequency response. The optimized filter is fabricated by the computer numeric controlled milling process. The measurement results show that the insertion loss is less than 3 dB and the return loss is better than 17 dB in the range 276–310 GHz. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

17 pages, 5306 KiB  
Article
Beating of a Spherical Liquid Crystal Elastomer Balloon under Periodic Illumination
by Wenyan Cheng, Quanbao Cheng, Changshen Du, Yuntong Dai and Kai Li
Micromachines 2022, 13(5), 769; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13050769 - 13 May 2022
Cited by 2 | Viewed by 1656
Abstract
Periodic excitation is a relatively simple and common active control mode. Owing to the advantages of direct access to environmental energy and controllability under periodic illumination, it enjoys broad prospects for application in soft robotics and opto-mechanical energy conversion systems. More new oscillating [...] Read more.
Periodic excitation is a relatively simple and common active control mode. Owing to the advantages of direct access to environmental energy and controllability under periodic illumination, it enjoys broad prospects for application in soft robotics and opto-mechanical energy conversion systems. More new oscillating systems need to be excavated to meet the various application requirements. A spherical liquid crystal elastomer (LCE) balloon model driven by periodic illumination is proposed and its periodic beating is studied theoretically. Based on the existing dynamic LCE model and the ideal gas model, the governing equation of motion for the LCE balloon is established. The numerical calculations show that periodic illumination can cause periodic beating of the LCE balloon, and the beating period of the LCE balloon depends on the illumination period. For the maximum steady-state amplitude of the beating, there exists an optimum illumination period and illumination time rate. The optimal illumination period is proved to be equivalent to the natural period of balloon oscillation. The effect of system parameters on beating amplitude are also studied. The amplitude is mainly affected by light intensity, contraction coefficient, amount of gaseous substance, volume of LCE balloon, mass density, external pressure, and damping coefficient, but not the initial velocity. It is expected that the beating LCE balloon will be suitable for the design of light-powered machines including engines, prosthetic blood pumps, aircraft, and swimmers. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

10 pages, 4857 KiB  
Article
Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding
by Shang-Pu Wang, Tien-Hsiang Lee, You-Yuan Chen and Pei-Hsun Wang
Micromachines 2022, 13(3), 454; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13030454 - 17 Mar 2022
Cited by 5 | Viewed by 1955
Abstract
In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion. By integrating SU-8 [...] Read more.
In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion. By integrating SU-8 polymer as the outer cladding layer, the waveguide dispersion can be tuned from −143 to −257 ps/nm/km. Through the simple, conventional polymer stripping process, we reconstruct the waveguide dispersion back to that of the original air-cladded device without significantly impacting the quality factor of resonators. This work provides the potential to design the waveguide dispersion in normal and anomalous regimes within an integrated photonic circuit. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

14 pages, 2748 KiB  
Article
Thermally Driven Self-Rotation of a Hollow Torus Motor
by Changshen Du, Biao Zhang, Quanbao Cheng, Peibao Xu and Kai Li
Micromachines 2022, 13(3), 434; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13030434 - 12 Mar 2022
Cited by 6 | Viewed by 2521
Abstract
Self-oscillating systems based on thermally responsive polymer materials can realize heat-mechanical transduction in a steady ambient temperature field and have huge application potential in the field of micro-active machines, micro-robotics and energy harvesters. Recently, experiments have found that a torus on a hot [...] Read more.
Self-oscillating systems based on thermally responsive polymer materials can realize heat-mechanical transduction in a steady ambient temperature field and have huge application potential in the field of micro-active machines, micro-robotics and energy harvesters. Recently, experiments have found that a torus on a hot surface can rotate autonomously and continuously, and its rotating velocity is determined by the competition between the thermally induced driving moment and the sliding friction moment. In this article, we theoretically study the self-sustained rotation of a hollow torus on a hot surface and explore the effect of the radius ratio on its rotational angular velocity and energy efficiency. By establishing a theoretical model of heat-driven self-sustained rotation, its analytical driving moment is derived, and the equilibrium equation for its steady rotation is obtained. Numerical calculation shows that with the increase in the radius ratio, the angular velocity of its rotation monotonously increases, while the energy efficiency of the self-rotating hollow torus motor first increases and then decreases. In addition, the effects of several system parameters on the angular velocity of it are also extensively investigated. The results in this paper have a guiding role in the application of hollow torus motor in the fields of micro-active machines, thermally driven motors and waste heat harvesters. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

Review

Jump to: Research, Other

21 pages, 4059 KiB  
Review
Trends and Applications of Surface and Bulk Acoustic Wave Devices: A Review
by Yang Yang, Corinne Dejous and Hamida Hallil
Micromachines 2023, 14(1), 43; https://0-doi-org.brum.beds.ac.uk/10.3390/mi14010043 - 24 Dec 2022
Cited by 14 | Viewed by 4573
Abstract
The past few decades have witnessed the ultra-fast development of wireless telecommunication systems, such as mobile communication, global positioning, and data transmission systems. In these applications, radio frequency (RF) acoustic devices, such as bulk acoustic waves (BAW) and surface acoustic waves (SAW) devices, [...] Read more.
The past few decades have witnessed the ultra-fast development of wireless telecommunication systems, such as mobile communication, global positioning, and data transmission systems. In these applications, radio frequency (RF) acoustic devices, such as bulk acoustic waves (BAW) and surface acoustic waves (SAW) devices, play an important role. As the integration technology of BAW and SAW devices is becoming more mature day by day, their application in the physical and biochemical sensing and actuating fields has also gradually expanded. This has led to a profusion of associated literature, and this article particularly aims to help young professionals and students obtain a comprehensive overview of such acoustic technologies. In this perspective, we report and discuss the key basic principles of SAW and BAW devices and their typical geometries and electrical characterization methodology. Regarding BAW devices, we give particular attention to film bulk acoustic resonators (FBARs), due to their advantages in terms of high frequency operation and integrability. Examples illustrating their application as RF filters, physical sensors and actuators, and biochemical sensors are presented. We then discuss recent promising studies that pave the way for the exploitation of these elastic wave devices for new applications that fit into current challenges, especially in quantum acoustics (single-electron probe/control and coherent coupling between magnons and phonons) or in other fields. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

30 pages, 41425 KiB  
Review
Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice
by Ahmad Rahbar Ranji, Vijayakanthan Damodaran, Kevin Li, Zilang Chen, Shahpour Alirezaee and Mohammed Jalal Ahamed
Micromachines 2022, 13(10), 1676; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13101676 - 05 Oct 2022
Cited by 14 | Viewed by 3607
Abstract
Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyroscopes, many microscale hemispherical-shaped resonators have been [...] Read more.
Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyroscopes, many microscale hemispherical-shaped resonators have been produced due to the rapid advancement in semiconductor-based microfabrication technologies. The dynamic performance of hemispherical resonators depends on the degree of symmetry, uniformity of thickness, and surface smoothness, which, in turn, depend on the type of materials and fabrication methods. The main aim of this review paper is to summarize the materials, characterization and fabrication methods reported in the literature for the fabrication of microscale hemispherical resonator gyroscopes (µHRGs). The theory behind the development of HRGs is described and advancements in the fabrication of microscale HRGs through various semiconductor-based fabrication techniques are outlined. The integration of electrodes with the hemispherical structure for electrical transduction using other materials and fabrication methods is also presented. A comparison of different materials and methods of fabrication from the point of view of device characteristics and dynamic performance is discussed. This review can help researchers in their future research and engineers to select the materials and methods for µHRG development. Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
►▼ Show Figures

Figure 1

Other

Jump to: Research, Review

1 pages, 151 KiB  
Correction
Correction: Lai et al. Sensitivity Enhancement of Group Refractive Index Biosensor through Ring-Down Interferograms of Microring Resonator. Micromachines 2022, 13, 922
by Hsuan Lai, Tzu-Ning Kuo, Jia-Yi Xu, Shih-Hsiang Hsu and Yi-Cheng Hsu
Micromachines 2022, 13(7), 1152; https://0-doi-org.brum.beds.ac.uk/10.3390/mi13071152 - 21 Jul 2022
Cited by 1 | Viewed by 800
Abstract
In the original publication [...] Full article
(This article belongs to the Special Issue Micro/Nano Resonators, Actuators, and Their Applications)
Show export options expand_more Show export options expand_less
Select all
Export citation of selected articles as:
 
Displaying articles 1-20
Back to TopTop