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Piezoelectric Micro- and Nano-Devices

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: closed (15 May 2018) | Viewed by 130543

Special Issue Editors

Dr. Guillermo Villanueva

E-Mail Website
Guest Editor
Mechanical Engineering Institute, École Polytechnique Fédérale de Lausanne (EPFL), Route Cantonale, 1015 Lausanne, Switzerland
Interests: MEMS; NEMS; piezoelectric transduction; resonators; nonlinearity; 2D materials
Special Issues, Collections and Topics in MDPI journals
Dr. Tom Larsen

E-Mail Website
Guest Editor
École Polytechnique Fédérale de Lausanne (EPFL), Route Cantonale, 1015 Lausanne, Switzerland
Interests: MEMS/NEMS, sensing and actuation (thermal, piezoresistive and piezoelectric), mechanical resonators, 2D materials

Special Issue Information

Dear Colleagues,

For almost a century, piezoelectric materials have been widely used in actuators, clocks, frequency sources, filters and other components in communication systems. Quartz has been the most used material but, harnessing the development of micro- and nano-fabrication techniques, it is now possible to grow very thin layers of piezoelectric materials. This can be seen, for example, in the huge market penetration that aluminum nitride (AlN) thin film acoustic resonators have as filters and duplexers.

However, beyond this state-of-the-art, there is a growing community in the broad field of piezoelectric micro- and nano-devices. Interest ranges from the material science (PZT, ZnO, AlScN, LNO, BaTiO, etc.), to the complex systems (MEMS-based radio, PMUTs, etc.).

This Special Issue aims to gather many of these recent advances and give them the proper venue to be presented to the scientific community. Topics include, but are not limited, to:

  • Piezoelectric transduction

  • Flexoelectric transduction

  • Thin films growth

  • Sensors

  • Actuators

  • Resonators

  • Electromechanical filters

  • Surface Acoustic Wave (SAW) devices

  • FBARs, CMRs, CLMRs

  • Solidly Mounted Resonators (SMRs)

  • Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

  • Acoustic devices

  • Micropumps

Prof. Guillermo Villanueva
Dr. Tom Larsen
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Published Papers (23 papers)

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11 pages, 5800 KiB  
Article
Surface-Acoustic-Wave Sensor Design for Acceleration Measurement
by Sergey Shevchenko, Alexander Kukaev, Maria Khivrich and Dmitry Lukyanov
Sensors 2018, 18(7), 2301; https://0-doi-org.brum.beds.ac.uk/10.3390/s18072301 - 16 Jul 2018
Cited by 18 | Viewed by 4309
Abstract
We suggest a concept design of a SAW-based microaccelerometer with an original triangular-shaped console-type sensing element. Our design is particularly optimized to increase the robustness against positioning errors of the SAW resonators on the opposite sides of the console. We also describe the [...] Read more.
We suggest a concept design of a SAW-based microaccelerometer with an original triangular-shaped console-type sensing element. Our design is particularly optimized to increase the robustness against positioning errors of the SAW resonators on the opposite sides of the console. We also describe the results of computer simulations and laboratory tests that are in a perfect agreement with each other and present the sensitivity characteristics of a manufactured experimental design device. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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13 pages, 5521 KiB  
Article
A Simplified Analysis Method for the Piezo Jet Dispenser with a Diamond Amplifier
by Guiling Deng, Na Wang, Can Zhou and Junhui Li
Sensors 2018, 18(7), 2115; https://0-doi-org.brum.beds.ac.uk/10.3390/s18072115 - 02 Jul 2018
Cited by 21 | Viewed by 3681
Abstract
Diamond amplifiers have been widely applied in Nano actuators and Robots. In order to study the dynamic characteristics of the diamond amplifier system which is used in the piezo jet dispenser, it is simplified as a spring-mass-damper system. The dynamic characteristics of the [...] Read more.
Diamond amplifiers have been widely applied in Nano actuators and Robots. In order to study the dynamic characteristics of the diamond amplifier system which is used in the piezo jet dispenser, it is simplified as a spring-mass-damper system. The dynamic characteristics of the jet dispenser system are analyzed with the simplified method. The characteristics are also tested. The results agree with the simulation, which proves the method is feasible. It will provide a simplified and intuitive representation of the movement of the amplifier, and also provide reliable simulation and experimental platforms for jet dispensing analysis. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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10 pages, 2476 KiB  
Article
High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors
by Yi-Jia Du, Ting-Ting Yang, Dong-Dong Gong, Yi-Cheng Wang, Xiang-Yu Sun, Feng Qin and Gang Dai
Sensors 2018, 18(7), 2055; https://0-doi-org.brum.beds.ac.uk/10.3390/s18072055 - 27 Jun 2018
Cited by 5 | Viewed by 3684
Abstract
The scale factor drifts and other long-term instability drifts of Micro-Electro-Mechanical System (MEMS) inertial sensors are the main contributors of the position and orientation errors in high dynamic environments. In this paper, a novel high dynamic micro vibrator, which could provide high acceleration [...] Read more.
The scale factor drifts and other long-term instability drifts of Micro-Electro-Mechanical System (MEMS) inertial sensors are the main contributors of the position and orientation errors in high dynamic environments. In this paper, a novel high dynamic micro vibrator, which could provide high acceleration and high angular rate rotation with integrated optical displacement detector, is proposed. Commercial MEMS inertial sensors, including 3-axis accelerometer and 6-axis inertial measurement unit which is about 3 mm * 3 mm * 1 mm with 19 mg, could be bonded on the vibration platform of the micro vibrator to perform in-situ during the self-calibration procedure. The high dynamic micro vibrator is fabricated by a fully-integrated MEMS process, including lead zirconate titanate (PZT) film deposition, PZT and electrodes patterning, and structural ion etching. The optical displacement detector, using vertical-cavity surface-emitting laser (VCSEL) and photoelectric diodes (PD), is integrated on the top of the package to measure the 6-DOF vibrating displacement with the detecting resolution of 150 nm in the range of 500 μm. The maximum out-of-plane acceleration of the z-axis vibrating platform loaded with commercial 3-axis accelerometer (H3LIS331DL) achieves above 16 g and the maximum angular velocity achieves above 720°/s when the driving voltage is ±6 V. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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10 pages, 12090 KiB  
Article
Hydrodynamic Tweezers: Trapping and Transportation in Microscale Using Vortex Induced by Oscillation of a Single Piezoelectric Actuator
by Xiaoming Liu, Qing Shi, Yuqing Lin, Masaru Kojima, Yasushi Mae, Qiang Huang, Toshio Fukuda and Tatsuo Arai
Sensors 2018, 18(7), 2002; https://0-doi-org.brum.beds.ac.uk/10.3390/s18072002 - 22 Jun 2018
Cited by 19 | Viewed by 3671
Abstract
The demand for a harmless noncontact trapping and transportation method in manipulation and measurement of biological micro objects waits to be met. In this paper, a novel micromanipulation method named “Hydrodynamic Tweezers” using the vortex induced by oscillating a single piezoelectric actuator is [...] Read more.
The demand for a harmless noncontact trapping and transportation method in manipulation and measurement of biological micro objects waits to be met. In this paper, a novel micromanipulation method named “Hydrodynamic Tweezers” using the vortex induced by oscillating a single piezoelectric actuator is introduced. The piezoelectric actuator is set between a micropipette and a copper beam. Oscillating the actuator at a certain frequency causes the resonance of the copper beam and extend 1D straight oscillation of the piezoelectric actuator to 2D circular oscillation of the micropipette, which induces a micro vortex after putting the micropipette into fluid. The induced vortex featuring low pressure in its core area can trap the object nearby. A robotic micromanipulator is utilized to transport the trapped objects together with the micropipette. Experiments of trapping and transportation microbeads are carried out to characterize the key parameters. The results show that the trapping force can be controlled by adjusting peak-peak voltage of the sinusoidal voltage input into the piezoelectric actuator. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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12 pages, 3514 KiB  
Article
Coupling of PZT Thin Films with Bimetallic Strip Heat Engines for Thermal Energy Harvesting
by Jihane Boughaleb, Arthur Arnaud, Benoit Guiffard, Daniel Guyomar, Raynald Seveno, Stéphane Monfray, Thomas Skotnicki and Pierre-Jean Cottinet
Sensors 2018, 18(6), 1859; https://0-doi-org.brum.beds.ac.uk/10.3390/s18061859 - 06 Jun 2018
Cited by 2 | Viewed by 5485
Abstract
A thermal energy harvester based on a double transduction mechanism and which converts thermal energy into electrical energy by means of piezoelectric membranes and bimetals, has previously been developed and widely presented in the literature In such a device, the thermo-mechanical conversion is [...] Read more.
A thermal energy harvester based on a double transduction mechanism and which converts thermal energy into electrical energy by means of piezoelectric membranes and bimetals, has previously been developed and widely presented in the literature In such a device, the thermo-mechanical conversion is ensured by a bimetal whereas the electro-mechanical conversion is generated by a piezoelectric ceramic. However, it has been shown that only 19% of the mechanical energy delivered by the bimetal during its snap is converted into electrical energy. To extract more energy from the bimetallic strip and to increase the transduction efficiency, a new way to couple piezoelectric materials with bimetals has thus been explored through direct deposition of piezoelectric layers on bimetals. This paper consequently presents an alternative way to harvest heat, based on piezoelectric bimetallic strip heat engines and presents a proof of concept of such a system. In this light, different PZT (Lead zirconate titanate) thin films were synthesized directly on aluminium foils and were attached to the bimetals using conductive epoxy. The fabrication process of each sample is presented herein as well as the experimental tests carried out on the devices. Throughout this study, different thicknesses of the piezoelectric layers and substrates were tested to determine the most powerful configuration. Finally, the study also gives some guidelines for future improvements of piezoelectric bimetals. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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15 pages, 6159 KiB  
Article
Effects of Proof Mass Geometry on Piezoelectric Vibration Energy Harvesters
by Abdul Hafiz Alameh, Mathieu Gratuze, Mohannad Y. Elsayed and Frederic Nabki
Sensors 2018, 18(5), 1584; https://0-doi-org.brum.beds.ac.uk/10.3390/s18051584 - 16 May 2018
Cited by 35 | Viewed by 5649
Abstract
Piezoelectric energy harvesters have proven to have the potential to be a power source in a wide range of applications. As the harvester dimensions scale down, the resonance frequencies of these devices increase drastically. Proof masses are essential in micro-scale devices in order [...] Read more.
Piezoelectric energy harvesters have proven to have the potential to be a power source in a wide range of applications. As the harvester dimensions scale down, the resonance frequencies of these devices increase drastically. Proof masses are essential in micro-scale devices in order to decrease the resonance frequency and increase the strain along the beam to increase the output power. In this work, the effects of proof mass geometry on piezoelectric energy harvesters are studied. Different geometrical dimension ratios have significant impact on the resonance frequency, e.g., beam to mass lengths, and beam to mass widths. A piezoelectric energy harvester has been fabricated and tested operating at a frequency of about 4 kHz within the audible range. The responses of various prototypes were studied, and an optimized T-shaped piezoelectric vibration energy harvester design is presented for improved performance. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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13 pages, 7088 KiB  
Article
Flow Channel Influence of a Collision-Based Piezoelectric Jetting Dispenser on Jet Performance
by Can Zhou, Guiling Deng, Junhui Li and Ji’an Duan
Sensors 2018, 18(4), 1270; https://0-doi-org.brum.beds.ac.uk/10.3390/s18041270 - 20 Apr 2018
Cited by 24 | Viewed by 4903
Abstract
To improve the jet performance of a bi-piezoelectric jet dispenser, mathematical and simulation models were established according to the operating principle. In order to improve the accuracy and reliability of the simulation calculation, a viscosity model of the fluid was fitted to a [...] Read more.
To improve the jet performance of a bi-piezoelectric jet dispenser, mathematical and simulation models were established according to the operating principle. In order to improve the accuracy and reliability of the simulation calculation, a viscosity model of the fluid was fitted to a fifth-order function with shear rate based on rheological test data, and the needle displacement model was fitted to a nine-order function with time based on real-time displacement test data. The results show that jet performance is related to the diameter of the nozzle outlet and the cone angle of the nozzle, and the impacts of the flow channel structure were confirmed. The approach of numerical simulation is confirmed by the testing results of droplet volume. It will provide a reliable simulation platform for mechanical collision-based jet dispensing and a theoretical basis for micro jet valve design and improvement. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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15 pages, 32022 KiB  
Article
A Novel Well Drill Assisted with High-Frequency Vibration Using the Bending Mode
by Xinda Qi, Weishan Chen, Yingxiang Liu, Xintian Tang and Shengjun Shi
Sensors 2018, 18(4), 1167; https://0-doi-org.brum.beds.ac.uk/10.3390/s18041167 - 11 Apr 2018
Cited by 11 | Viewed by 4188
Abstract
It is important for companies to increase the efficiency of drilling as well as prolong the lifetime of the drilling tool. Since some previous investigations indicated that a superposition of well drilling with an additional vibration increases the drilling efficiency, this paper introduces [...] Read more.
It is important for companies to increase the efficiency of drilling as well as prolong the lifetime of the drilling tool. Since some previous investigations indicated that a superposition of well drilling with an additional vibration increases the drilling efficiency, this paper introduces a novel well drill which is assisted with additional vibrations by means of piezoelectric sandwich bending vibration transducer. The proposed drill uses bending vibrations in two different directions to from an elliptical trajectory movement, which can help the drill to break the surface of hard material more efficiently and clean away the lithic fragments more easily. The proposed well drill with bending vibration transducer is designed to have a resonance frequency of the first bending vibration mode of about 1779 Hz. The motion equation of the particle on the edge of the drill bit is developed and analyzed. The vibration trajectory of the particle on the edge of the drill bit is calculated by using finite element method. A prototype of the proposed drill using bending vibrations is fabricated and tested to verify the aim of drilling efficiency increase. The feed speed of the vibration assisted drilling is tested to be about 0.296 mm/s when the excitation voltage of the transducer is 300 V, while this speed decreases to about 0.195 mm/s when no vibration is added. This comparison shows that the feed speed of the vibration assisted drilling is about 52% higher than that of the normal drilling, which means the proposed drill has a better efficiency and it is important to consider vibration superimposition in well drilling. In addition, the surface of the drill hole gained by the vibration assisted drilling is smoother than that of the normal drilling, which makes the clearance easier. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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17 pages, 12253 KiB  
Article
An Equivalent Circuit of Longitudinal Vibration for a Piezoelectric Structure with Losses
by Tao Yuan, Chaodong Li and Pingqing Fan
Sensors 2018, 18(4), 947; https://0-doi-org.brum.beds.ac.uk/10.3390/s18040947 - 22 Mar 2018
Cited by 4 | Viewed by 4273
Abstract
Equivalent circuits of piezoelectric structures such as bimorphs and unimorphs conventionally focus on the bending vibration modes. However, the longitudinal vibration modes are rarely considered even though they also play a remarkable role in piezoelectric devices. Losses, especially elastic loss in the metal [...] Read more.
Equivalent circuits of piezoelectric structures such as bimorphs and unimorphs conventionally focus on the bending vibration modes. However, the longitudinal vibration modes are rarely considered even though they also play a remarkable role in piezoelectric devices. Losses, especially elastic loss in the metal substrate, are also generally neglected, which leads to discrepancies compared with experiments. In this paper, a novel equivalent circuit with four kinds of losses is proposed for a beamlike piezoelectric structure under the longitudinal vibration mode. This structure consists of a slender beam as the metal substrate, and a piezoelectric patch which covers a partial length of the beam. In this approach, first, complex numbers are used to deal with four kinds of losses—elastic loss in the metal substrate, and piezoelectric, dielectric, and elastic losses in the piezoelectric patch. Next in this approach, based on Mason’s model, a new equivalent circuit is developed. Using MATLAB, impedance curves of this structure are simulated by the equivalent circuit method. Experiments are conducted and good agreements are revealed between experiments and equivalent circuit results. It is indicated that the introduction of four losses in an equivalent circuit can increase the result accuracy considerably. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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10 pages, 10656 KiB  
Article
A Quadruped Micro-Robot Based on Piezoelectric Driving
by Qi Su, Qiquan Quan, Jie Deng and Hongpeng Yu
Sensors 2018, 18(3), 810; https://0-doi-org.brum.beds.ac.uk/10.3390/s18030810 - 07 Mar 2018
Cited by 24 | Viewed by 5940
Abstract
Inspired by a way of rowing, a new piezoelectric driving quadruped micro-robot operating in bending-bending hybrid vibration modes was proposed and tested in this work. The robot consisted of a steel base, four steel connecting pins and four similar driving legs, and all [...] Read more.
Inspired by a way of rowing, a new piezoelectric driving quadruped micro-robot operating in bending-bending hybrid vibration modes was proposed and tested in this work. The robot consisted of a steel base, four steel connecting pins and four similar driving legs, and all legs were bonded by four piezoelectric ceramic plates. The driving principle is discussed, which is based on the hybrid of first order vertical bending and first order horizontal bending vibrations. The bending-bending hybrid vibration modes motivated the driving foot to form an elliptical trajectory in space. The vibrations of four legs were used to provide the driving forces for robot motion. The proposed robot was fabricated and tested according to driving principle. The vibration characteristics and elliptical movements of the driving feet were simulated by FEM method. Experimental tests of vibration characteristics and mechanical output abilities were carried out. The tested resonance frequencies and vibration amplitudes agreed well with the FEM calculated results. The size of robot is 36 mm × 98 mm × 14 mm, its weight is only 49.8 g, but its maximum load capacity achieves 200 g. Furthermore, the robot can achieve a maximum speed of 33.45 mm/s. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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12 pages, 5577 KiB  
Article
Optimization and Analysis of a U-Shaped Linear Piezoelectric Ultrasonic Motor Using Longitudinal Transducers
by Hongpeng Yu, Qiquan Quan, Xinqi Tian and He Li
Sensors 2018, 18(3), 809; https://0-doi-org.brum.beds.ac.uk/10.3390/s18030809 - 07 Mar 2018
Cited by 35 | Viewed by 4866
Abstract
A novel U-shaped piezoelectric ultrasonic motor that mainly focused on miniaturization and high power density was proposed, fabricated, and tested in this work. The longitudinal vibrations of the transducers were excited to form the elliptical movements on the driving feet. Finite element method [...] Read more.
A novel U-shaped piezoelectric ultrasonic motor that mainly focused on miniaturization and high power density was proposed, fabricated, and tested in this work. The longitudinal vibrations of the transducers were excited to form the elliptical movements on the driving feet. Finite element method (FEM) was used for design and analysis. The resonance frequencies of the selected vibration modes were tuned to be very close to each other with modal analysis and the movement trajectories of the driving feet were gained with transient simulation. The vibration modes and the mechanical output abilities were tested to evaluate the proposed motor further by a prototype. The maximum output speed was tested to be 416 mm/s, the maximum thrust force was 21 N, and the maximum output power was 5.453 W under frequency of 29.52 kHz and voltage of 100 Vrms. The maximum output power density of the prototype reached 7.59 W/kg, which was even greater than a previous similar motor under the exciting voltage of 200 Vrms. The proposed motor showed great potential for linear driving of large thrust force and high power density. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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16 pages, 7160 KiB  
Article
Sensing Performance Analysis on Quartz Tuning Fork-Probe at the High Order Vibration Mode for Multi-Frequency Scanning Probe Microscopy
by Xiaofei Zhang, Fengli Gao and Xide Li
Sensors 2018, 18(2), 336; https://0-doi-org.brum.beds.ac.uk/10.3390/s18020336 - 24 Jan 2018
Cited by 8 | Viewed by 4865
Abstract
Multi-frequency scanning near-field optical microscopy, based on a quartz tuning fork-probe (QTF-p) sensor using the first two orders of in-plane bending symmetrical vibration modes, has recently been developed. This method can simultaneously achieve positional feedback (based on the 1st in-plane mode called the [...] Read more.
Multi-frequency scanning near-field optical microscopy, based on a quartz tuning fork-probe (QTF-p) sensor using the first two orders of in-plane bending symmetrical vibration modes, has recently been developed. This method can simultaneously achieve positional feedback (based on the 1st in-plane mode called the low mode) and detect near-field optically induced forces (based on the 2nd in-plane mode called the high mode). Particularly, the high mode sensing performance of the QTF-p is an important issue for characterizing the tip-sample interactions and achieving higher resolution microscopic imaging but the related researches are insufficient. Here, we investigate the vibration performance of QTF-p at high mode based on the experiment and finite element method. The frequency spectrum characteristics are obtained by our homemade laser Doppler vibrometer system. The effects of the properties of the connecting glue layer and the probe features on the dynamic response of the QTF-p sensor at the high mode are investigated for optimization design. Finally, compared with the low mode, an obvious improvement of quality factor, of almost 50%, is obtained at the high mode. Meanwhile, the QTF-p sensor has a high force sensing sensitivity and a large sensing range at the high mode, indicating a broad application prospect for force sensing. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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16 pages, 8013 KiB  
Article
Peri-Elastodynamic Simulations of Guided Ultrasonic Waves in Plate-Like Structure with Surface Mounted PZT
by Subir Patra, Hossain Ahmed and Sourav Banerjee
Sensors 2018, 18(1), 274; https://0-doi-org.brum.beds.ac.uk/10.3390/s18010274 - 18 Jan 2018
Cited by 22 | Viewed by 6555
Abstract
Peridynamic based elastodynamic computation tool named Peri-elastodynamics is proposed herein to simulate the three-dimensional (3D) Lamb wave modes in materials for the first time. Peri-elastodynamics is a nonlocal meshless approach which is a scale-independent generalized technique to visualize the acoustic and ultrasonic waves [...] Read more.
Peridynamic based elastodynamic computation tool named Peri-elastodynamics is proposed herein to simulate the three-dimensional (3D) Lamb wave modes in materials for the first time. Peri-elastodynamics is a nonlocal meshless approach which is a scale-independent generalized technique to visualize the acoustic and ultrasonic waves in plate-like structure, micro-electro-mechanical systems (MEMS) and nanodevices for their respective characterization. In this article, the characteristics of the fundamental Lamb wave modes are simulated in a sample plate-like structure. Lamb wave modes are generated using a surface mounted piezoelectric (PZT) transducer which is actuated from the top surface. The proposed generalized Peri-elastodynamics method is not only capable of simulating two dimensional (2D) in plane wave under plane strain condition formulated previously but also capable of accurately simulating the out of plane Symmetric and Antisymmetric Lamb wave modes in plate like structures in 3D. For structural health monitoring (SHM) of plate-like structures and nondestructive evaluation (NDE) of MEMS devices, it is necessary to simulate the 3D wave-damage interaction scenarios and visualize the different wave features due to damages. Hence, in addition, to simulating the guided ultrasonic wave modes in pristine material, Lamb waves were also simulated in a damaged plate. The accuracy of the proposed technique is verified by comparing the modes generated in the plate and the mode shapes across the thickness of the plate with theoretical wave analysis. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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896 KiB  
Article
PCA Based Stress Monitoring of Cylindrical Specimens Using PZTs and Guided Waves
by Jabid Quiroga, Luis Mujica, Rodolfo Villamizar, Magda Ruiz and Jhonatan Camacho
Sensors 2017, 17(12), 2788; https://0-doi-org.brum.beds.ac.uk/10.3390/s17122788 - 01 Dec 2017
Cited by 15 | Viewed by 4107
Abstract
Since mechanical stress in structures affects issues such as strength, expected operational life and dimensional stability, a continuous stress monitoring scheme is necessary for a complete integrity assessment. Consequently, this paper proposes a stress monitoring scheme for cylindrical specimens, which are widely used [...] Read more.
Since mechanical stress in structures affects issues such as strength, expected operational life and dimensional stability, a continuous stress monitoring scheme is necessary for a complete integrity assessment. Consequently, this paper proposes a stress monitoring scheme for cylindrical specimens, which are widely used in structures such as pipelines, wind turbines or bridges. The approach consists of tracking guided wave variations due to load changes, by comparing wave statistical patterns via Principal Component Analysis (PCA). Each load scenario is projected to the PCA space by means of a baseline model and represented using the Q-statistical indices. Experimental validation of the proposed methodology is conducted on two specimens: (i) a 12.7 mm ( 1 / 2 ″ ) diameter, 0.4 m length, AISI 1020 steel rod, and (ii) a 25.4 mm ( 1 ″ ) diameter, 6m length, schedule 40, A-106, hollow cylinder. Specimen 1 was subjected to axial loads, meanwhile specimen 2 to flexion. In both cases, simultaneous longitudinal and flexural guided waves were generated via piezoelectric devices (PZTs) in a pitch-catch configuration. Experimental results show the feasibility of the approach and its potential use as in-situ continuous stress monitoring application. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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7096 KiB  
Article
Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors
by Xinran Tan, Fan Zhu, Chao Wang, Yang Yu, Jian Shi, Xue Qi, Feng Yuan and Jiubin Tan
Sensors 2017, 17(11), 2672; https://0-doi-org.brum.beds.ac.uk/10.3390/s17112672 - 19 Nov 2017
Cited by 11 | Viewed by 6295
Abstract
This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG) that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The principal error of the capacitive sensor [...] Read more.
This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG) that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The principal error of the capacitive sensor for precision microangle measurement is analyzed and compensated for; so as to achieve a high angle output resolution of 10 nrad (0.002 arcsec) and positioning repeatability of 120 nrad (0.024 arcsec) over a large angular range of ±4363 μrad (±900 arcsec) for the 2D-MNAG. The impact of each error component, together with the synthetic error of the 2D-MNAG after principal error compensation are determined using Monte Carlo simulation for further improvement of the 2D-MNAG. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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12201 KiB  
Article
A High Sensitivity Preamplifier for Quartz Tuning Forks in QEPAS (Quartz Enhanced PhotoAcoustic Spectroscopy) Applications
by Tomasz Starecki and Piotr Z. Wieczorek
Sensors 2017, 17(11), 2528; https://0-doi-org.brum.beds.ac.uk/10.3390/s17112528 - 03 Nov 2017
Cited by 24 | Viewed by 7862
Abstract
All the preamplifiers dedicated for Quartz Enhanced PhotoAcoustic Spectroscopy (QEPAS) applications that have so far been reported in the literature have been based on operational amplifiers working in transimpedance configurations. Taking into consideration that QEPAS sensors are based on quartz tuning forks, and [...] Read more.
All the preamplifiers dedicated for Quartz Enhanced PhotoAcoustic Spectroscopy (QEPAS) applications that have so far been reported in the literature have been based on operational amplifiers working in transimpedance configurations. Taking into consideration that QEPAS sensors are based on quartz tuning forks, and that quartz has a relatively high voltage constant and relatively low charge constant, it seems that a transimpedance amplifier is not an optimal solution. This paper describes the design of a quartz QEPAS sensor preamplifier, implemented with voltage amplifier configuration. Discussion of an electrical model of the circuit and preliminary measurements are presented. Both theoretical analysis and experiments show that use of the voltage configuration allows for a substantial increase of the output signal in comparison to the transimpedance circuit with the same tuning fork working in identical conditions. Assuming that the sensitivity of the QEPAS technique depends directly on the properties of the preamplifier, use of the voltage amplifier configuration should result in an increase of QEPAS sensitivity by one to two orders of magnitude. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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16358 KiB  
Article
A Multiscale Material Testing System for In Situ Optical and Electron Microscopes and Its Application
by Xuan Ye, Zhiguo Cui, Huajun Fang and Xide Li
Sensors 2017, 17(8), 1800; https://0-doi-org.brum.beds.ac.uk/10.3390/s17081800 - 04 Aug 2017
Cited by 13 | Viewed by 6014
Abstract
We report a novel material testing system (MTS) that uses hierarchical designs for in-situ mechanical characterization of multiscale materials. This MTS is adaptable for use in optical microscopes (OMs) and scanning electron microscopes (SEMs). The system consists of a microscale material testing module [...] Read more.
We report a novel material testing system (MTS) that uses hierarchical designs for in-situ mechanical characterization of multiscale materials. This MTS is adaptable for use in optical microscopes (OMs) and scanning electron microscopes (SEMs). The system consists of a microscale material testing module (m-MTM) and a nanoscale material testing module (n-MTM). The MTS can measure mechanical properties of materials with characteristic lengths ranging from millimeters to tens of nanometers, while load capacity can vary from several hundred micronewtons to several nanonewtons. The m-MTM is integrated using piezoelectric motors and piezoelectric stacks/tubes to form coarse and fine testing modules, with specimen length from millimeters to several micrometers, and displacement distances of 12 mm with 0.2 µm resolution for coarse level and 8 µm with 1 nm resolution for fine level. The n-MTM is fabricated using microelectromechanical system technology to form active and passive components and realizes material testing for specimen lengths ranging from several hundred micrometers to tens of nanometers. The system’s capabilities are demonstrated by in-situ OM and SEM testing of the system’s performance and mechanical properties measurements of carbon fibers and metallic microwires. In-situ multiscale deformation tests of Bacillus subtilis filaments are also presented. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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6193 KiB  
Article
Research on a Novel Exciting Method for a Sandwich Transducer Operating in Longitudinal-Bending Hybrid Modes
by Yingxiang Liu, Qiangqiang Shen, Shengjun Shi, Jie Deng, Weishan Chen and Liang Wang
Sensors 2017, 17(7), 1510; https://0-doi-org.brum.beds.ac.uk/10.3390/s17071510 - 27 Jun 2017
Cited by 6 | Viewed by 5488
Abstract
A novel exciting method for a sandwich type piezoelectric transducer operating in longitudinal-bending hybrid vibration modes is proposed and discussed, in which the piezoelectric elements for the excitations of the longitudinal and bending vibrations share the same axial location, but correspond to different [...] Read more.
A novel exciting method for a sandwich type piezoelectric transducer operating in longitudinal-bending hybrid vibration modes is proposed and discussed, in which the piezoelectric elements for the excitations of the longitudinal and bending vibrations share the same axial location, but correspond to different partitions. Whole-piece type piezoelectric plates with three separated partitions are used, in which the center partitions generate the first longitudinal vibration, while the upper and lower partitions produce the second bending vibration. Detailed comparisons between the proposed exciting method and the traditional one were accomplished by finite element method (FEM) calculations, which were further verified by experiments. Compared with the traditional exciting method using independent longitudinal ceramics and bending ceramics, the proposed method achieves higher electromechanical coupling factors and larger vibration amplitudes, especially for the bending vibration mode. This novel exciting method for longitudinal-bending hybrid vibrations has not changed the structural dimensions of the sandwich transducer, but markedly improves the mechanical output ability, which makes it very helpful and meaningful in designing new piezoelectric actuators operated in longitudinal-bending hybrid vibration modes. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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4693 KiB  
Article
Development of a Flexible Artificial Lateral Line Canal System for Hydrodynamic Pressure Detection
by Yonggang Jiang, Zhiqiang Ma, Jianchao Fu and Deyuan Zhang
Sensors 2017, 17(6), 1220; https://0-doi-org.brum.beds.ac.uk/10.3390/s17061220 - 26 May 2017
Cited by 39 | Viewed by 5739
Abstract
Surface mounted ‘smart skin’ can enhance the situational and environmental awareness of marine vehicles, which requires flexible, reliable, and light-weight hydrodynamic pressure sensors. Inspired by the lateral line canal system in fish, we developed an artificial lateral line (ALL) canal system by integrating [...] Read more.
Surface mounted ‘smart skin’ can enhance the situational and environmental awareness of marine vehicles, which requires flexible, reliable, and light-weight hydrodynamic pressure sensors. Inspired by the lateral line canal system in fish, we developed an artificial lateral line (ALL) canal system by integrating cantilevered flow-sensing elements in a polydimethylsiloxane (PDMS) canal. Polypropylene and polyvinylidene fluoride (PVDF) layers were laminated together to form the cantilevered flow-sensing elements. Both the ALL canal system and its superficial counterpart were characterized using a dipole vibration source. Experimental results showed that the peak frequencies of both the canal and superficial sensors were approximately 110 Hz, which was estimated to be the resonance frequency of the cantilevered flow-sensing element. The proposed ALL canal system demonstrated high-pass filtering capabilities to attenuate low-frequency stimulus and a pressure gradient detection limit of approximately 11 Pa/m at a frequency of 115 ± 1 Hz. Because of its structural flexibility and noise immunity, the proposed ALL canal system shows significant potential for underwater robotics applications. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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1413 KiB  
Article
LEM Characterization of Synthetic Jet Actuators Driven by Piezoelectric Element: A Review
by Matteo Chiatto, Francesco Capuano, Gennaro Coppola and Luigi De Luca
Sensors 2017, 17(6), 1216; https://0-doi-org.brum.beds.ac.uk/10.3390/s17061216 - 26 May 2017
Cited by 53 | Viewed by 6436
Abstract
In the last decades, Synthetic jet actuators have gained much interest among the flow control techniques due to their short response time, high jet velocity and absence of traditional piping, which matches the requirements of reduced size and low weight. A synthetic jet [...] Read more.
In the last decades, Synthetic jet actuators have gained much interest among the flow control techniques due to their short response time, high jet velocity and absence of traditional piping, which matches the requirements of reduced size and low weight. A synthetic jet is generated by the diaphragm oscillation (generally driven by a piezoelectric element) in a relatively small cavity, producing periodic cavity pressure variations associated with cavity volume changes. The pressured air exhausts through an orifice, converting diaphragm electrodynamic energy into jet kinetic energy. This review paper considers the development of various Lumped-Element Models (LEMs) as practical tools to design and manufacture the actuators. LEMs can quickly predict device performances such as the frequency response in terms of diaphragm displacement, cavity pressure and jet velocity, as well as the efficiency of energy conversion of input Joule power into useful kinetic power of air jet. The actuator performance is also analyzed by varying typical geometric parameters such as cavity height and orifice diameter and length, through a suited dimensionless form of the governing equations. A comprehensive and detailed physical modeling aimed to evaluate the device efficiency is introduced, shedding light on the different stages involved in the process. Overall, the influence of the coupling degree of the two oscillators, the diaphragm and the Helmholtz frequency, on the device performance is discussed throughout the paper. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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2608 KiB  
Article
PVDF Sensor Stimulated by Infrared Radiation for Temperature Monitoring in Microfluidic Devices
by Salvatore A. Pullano, Ifana Mahbub, Syed K. Islam and Antonino S. Fiorillo
Sensors 2017, 17(4), 850; https://0-doi-org.brum.beds.ac.uk/10.3390/s17040850 - 13 Apr 2017
Cited by 29 | Viewed by 7874
Abstract
This paper presents a ferroelectric polymer-based temperature sensor designed for microfluidic devices. The integration of the sensor into a system-on-a-chip platform facilitates quick monitoring of localized temperature of a biological fluid, avoiding errors in the evaluation of thermal evolution of the fluid during [...] Read more.
This paper presents a ferroelectric polymer-based temperature sensor designed for microfluidic devices. The integration of the sensor into a system-on-a-chip platform facilitates quick monitoring of localized temperature of a biological fluid, avoiding errors in the evaluation of thermal evolution of the fluid during analysis. The contact temperature sensor is fabricated by combining a thin pyroelectric film together with an infrared source, which stimulates the active element located on the top of the microfluidic channel. An experimental setup was assembled to validate the analytical model and to characterize the response rate of the device. The evaluation procedure and the operating range of the temperature also make this device suitable for applications where the localized temperature monitoring of biological samples is necessary. Additionally, ease of integration with standard microfluidic devices makes the proposed sensor an attractive option for in situ analysis of biological fluids. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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4268 KiB  
Article
Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental Validation
by Peng-Zhi Li, Xiao-Dong Wang, Yong-Xin Sui, De-Fu Zhang, Dong-Fang Wang, Li-Jian Dong and Ming-Yang Ni
Sensors 2017, 17(4), 838; https://0-doi-org.brum.beds.ac.uk/10.3390/s17040838 - 11 Apr 2017
Cited by 13 | Viewed by 5037
Abstract
To improve the phase-shifting accuracy, this paper presents a novel integrated framework for design, control and experimental validation of the piezoelectric actuated phase shifter with a trade-off between accuracy and cost. The piezoelectric actuators with built-in sensors are adopted to drive the double [...] Read more.
To improve the phase-shifting accuracy, this paper presents a novel integrated framework for design, control and experimental validation of the piezoelectric actuated phase shifter with a trade-off between accuracy and cost. The piezoelectric actuators with built-in sensors are adopted to drive the double parallel four-bar linkage flexure hinge-based mechanisms. Three mechanisms form the tripod structure of the assembled phase shifter. Then, a semi-closed loop controller with inner feedback and outer feedforward loops via the external laser interferometer is developed for accurate positioning of the phase shifter. Finally, experiments related with travel range, step response, linearity and repeatability are carried out. The linearity error is 0.21% and the repeatability error of 10 μ m displacement is 3 nm. The results clearly demonstrate the good performance of the developed phase shifter and the feasibility of the proposed integrated framework. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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Review

Jump to: Research

18 pages, 2057 KiB  
Review
A Review of the Piezoelectric Electromechanical Impedance Based Structural Health Monitoring Technique for Engineering Structures
by Wongi S. Na and Jongdae Baek
Sensors 2018, 18(5), 1307; https://0-doi-org.brum.beds.ac.uk/10.3390/s18051307 - 24 Apr 2018
Cited by 225 | Viewed by 11611
Abstract
The birth of smart materials such as piezoelectric (PZT) transducers has aided in revolutionizing the field of structural health monitoring (SHM) based on non-destructive testing (NDT) methods. While a relatively new NDT method known as the electromechanical (EMI) technique has been investigated for [...] Read more.
The birth of smart materials such as piezoelectric (PZT) transducers has aided in revolutionizing the field of structural health monitoring (SHM) based on non-destructive testing (NDT) methods. While a relatively new NDT method known as the electromechanical (EMI) technique has been investigated for more than two decades, there are still various problems that must be solved before it is applied to real structures. The technique, which has a significant potential to contribute to the creation of one of the most effective SHM systems, involves the use of a single PZT for exciting and sensing of the host structure. In this paper, studies applied for the past decade related to the EMI technique have been reviewed to understand its trend. In addition, new concepts and ideas proposed by various authors are also surveyed, and the paper concludes with a discussion of the potential directions for future works. Full article
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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