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Journal: Micromachines, 2021
Volume: 12
Number: 1331
Article:
Dual Laser Beam Asynchronous Dicing of 4H-SiC Wafer
Authors:
by
Zhe Zhang, Zhidong Wen, Haiyan Shi, Qi Song, Ziye Xu, Man Li, Yu Hou and Zichen Zhang
Link:
https://0-www-mdpi-com.brum.beds.ac.uk/2072-666X/12/11/1331
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