Microstructure Evolution and Mechanical Behavior of Mo–Si–N Films
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
3.1. Chemical Composition
3.2. Phase Identification
3.3. Microstructure
3.4. Chemical Bondings
3.5. Surface Hardness and Elastic Modulus
3.6. Wear Resistance Behavior
4. Summary
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Sample Designation | Gas Inlet N2/(Ar + N2) (sccm/sccm) | Power Input (W) | Composition (at.%) | Deposition Rate (nm/s) | |||
---|---|---|---|---|---|---|---|
Mo | Si | Mo | Si | N | - | ||
A1 | 10/20 | 135 | 0 | 66.4 ± 0.8 | 0 | 33.6 ± 0.8 | 0.133 |
A2 | 100 | 41.9 ± 1.0 | 13.2 ± 0.4 | 44.9 ± 1.4 | 0.177 | ||
A3 | 150 | 34.9 ± 0.5 | 19.8 ± 0.2 | 45.3 ± 0.7 | 0.213 | ||
B1 | 5/20 | 135 | 0 | 75.8 ± 0.6 | 0 | 24.2 ± 0.6 | 0.134 |
B2 | 100 | 46.5 ± 0.6 | 22.6 ± 0.5 | 30.9 ± 1.1 | 0.146 | ||
B3 | 150 | 41.1 ± 0.4 | 33.7 ± 0.3 | 25.2 ± 0.6 | 0.268 |
Sample | Hardness, H (GPa) | Young’s Modulus, E (GPa) | H/E | H3/E2 |
---|---|---|---|---|
A1 | 19.1 ± 2.0 | 260 ± 21 | 0.073 | 0.103 |
A2 | 26.9 ± 0.4 | 273 ± 9 | 0.099 | 0.261 |
A3 | 17.1 ± 0.1 | 208 ± 5 | 0.082 | 0.116 |
B1 | 16.5 ± 0.6 | 241 ± 9 | 0.068 | 0.077 |
B2 | 17.5 ± 0.5 | 219 ± 5 | 0.080 | 0.112 |
B3 | 17.5 ± 0.4 | 213 ± 6 | 0.082 | 0.118 |
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Liu, Y.-C.; Liang, B.-H.; Huang, C.-R.; Wu, F.-B. Microstructure Evolution and Mechanical Behavior of Mo–Si–N Films. Coatings 2020, 10, 987. https://0-doi-org.brum.beds.ac.uk/10.3390/coatings10100987
Liu Y-C, Liang B-H, Huang C-R, Wu F-B. Microstructure Evolution and Mechanical Behavior of Mo–Si–N Films. Coatings. 2020; 10(10):987. https://0-doi-org.brum.beds.ac.uk/10.3390/coatings10100987
Chicago/Turabian StyleLiu, Yu-Cheng, Bing-Hao Liang, Chi-Ruei Huang, and Fan-Bean Wu. 2020. "Microstructure Evolution and Mechanical Behavior of Mo–Si–N Films" Coatings 10, no. 10: 987. https://0-doi-org.brum.beds.ac.uk/10.3390/coatings10100987