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Journal: Sensors, 2023
Volume: 23
Number: 5563

Article: Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD
Authors: by Yonggyun Park, Pengzhan Liu, Seunghwan Lee, Jinill Cho, Eric Joo, Hyeong-U Kim and Taesung Kim
Link: https://0-www-mdpi-com.brum.beds.ac.uk/1424-8220/23/12/5563

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