Optimization of AlCrSiWN Coating Process Parameters and Performance Study by the Matrix Analysis Method
Abstract
:1. Introduction
2. Matrix Analysis Method
3. Materials and Methods
3.1. Coating Preparation Process
- (1)
- Furnace cavity temperature rise: before coating deposition, the vacuum of the equipment cavity was fixed at 0.5 Pa, and then the temperature gradient of the furnace cavity was increased by controlling the heating tube; the gradient temperature was set to 350 °C and 420 °C for 10 min and 60 min of insulation, respectively.
- (2)
- Gas cleaning: we waited for the completion of insulation, passed 200 sccm of argon gas, set the bias voltage to −700 V and cleaned the target and furnace cavity for 4 min.
- (3)
- Ion etching: we waited for the completion of cleaning, raised the bias voltage to −800 V, maintained the vacuum level at 0.5 Pa, the argon flow rate at 200 sccm, and the temperature at 420 °C, passed a 90 A current to the Cr target and carried out ion etching on the workpiece for a total of 12 min.
- (4)
- Coating deposition: after ion etching was completed, the argon flow was turned off, and nitrogen was introduced into the furnace chamber to provide N elements. Cr target, AlCrSiW target and AlCr target are used in the deposition process. AlCrSiWN coatings with different process parameters were prepared by varying arc current, bias voltage and N2 flow rate.
3.2. Orthogonal Experimental Design
3.3. Structural and Performance Characterization Methods
4. Results and Discussion
4.1. Statistics of the Orthogonal Experimental Results and Matrix Analysis
4.2. Surface and Cross-Sectional Morphology
4.3. Hardness and Roughness
4.4. Bonding Strength
4.5. Frictional Properties
5. Conclusions
- (1)
- The three process parameters affect the experimental indexes in this order of priority: bias voltage > arc current > N2 flow rate.
- (2)
- It was found that the surface quality and mechanical properties of the coatings were optimal at a bias voltage of −80 V than at the other bias voltages examined.
- (3)
- After the frictional wear test, it was found that the coating had better frictional properties when the bias voltage was −80 V compared with other bias voltages, and the wear mechanism was mainly adhesive wear and oxidation wear.
- (4)
- We found that the optimum process parameters for the AlCrSiWN coating were as follows: an arc current of 160 A, a bias voltage of −80 V, and a N2 flow rate of 600 sccm.
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Acknowledgments
Conflicts of Interest
Abbreviations
A | Arc current/A |
B | Bias voltage/V |
C | N2 flow rate/sccm |
SEM | Scanning Electron Microscopy |
EDS | Energy-Dispersive Spectrometry |
Ra | Roughness parameters |
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Model | WC% | Co% | Graininess |
---|---|---|---|
K05 | 93.00 | 6.20 | 0.4 |
Programs | Factors | ||
---|---|---|---|
A (Arc Current/A) | B (Bias Voltage/V) | C (N2 Flow/sccm) | |
1 | 200 | −120 | 800 |
2 | 200 | −100 | 700 |
3 | 200 | −80 | 600 |
4 | 160 | −120 | 700 |
5 | 160 | −100 | 600 |
6 | 160 | −80 | 800 |
7 | 120 | −120 | 600 |
8 | 120 | −100 | 800 |
9 | 120 | −80 | 700 |
Programs | Factors | Hardness (HV0.025) | Adhesion (N) | Roughness (nm) | ||
---|---|---|---|---|---|---|
A (A) | B (V) | C (sccm) | ||||
1 | 200 | −120 | 800 | 3392.2 | 67.8 | 140.0 |
2 | 200 | −100 | 700 | 3407.7 | 81.1 | 138.7 |
3 | 200 | −80 | 600 | 3342.8 | 106.1 | 113.0 |
4 | 160 | −120 | 700 | 3793.4 | 85.1 | 130.0 |
5 | 160 | −100 | 600 | 3683.2 | 102.3 | 132.3 |
6 | 160 | −80 | 800 | 3783.5 | 95.7 | 127.2 |
7 | 120 | −120 | 600 | 3828.6 | 72.2 | 143.4 |
8 | 120 | −100 | 800 | 3649.0 | 76.3 | 115.1 |
9 | 120 | −80 | 700 | 3521.6 | 103.5 | 133.9 |
Bias Voltage/V | N/at.% | Al/at.% | Cr/at.% | Si/at.% | W/at.% |
---|---|---|---|---|---|
−60 | 48.22 | 33.78 | 16.6 | 1.14 | 0.26 |
−80 | 48.58 | 33.47 | 15.96 | 1.56 | 0.43 |
−100 | 48.27 | 33.37 | 16.8 | 1.17 | 0.39 |
−120 | 48.23 | 33.25 | 17.69 | 0.6 | 0.23 |
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Wei, S.; Wang, R.; Yang, H.; Guo, Z.; Lin, R.; Huang, Q.; Zhou, Y. Optimization of AlCrSiWN Coating Process Parameters and Performance Study by the Matrix Analysis Method. Materials 2022, 15, 5153. https://0-doi-org.brum.beds.ac.uk/10.3390/ma15155153
Wei S, Wang R, Yang H, Guo Z, Lin R, Huang Q, Zhou Y. Optimization of AlCrSiWN Coating Process Parameters and Performance Study by the Matrix Analysis Method. Materials. 2022; 15(15):5153. https://0-doi-org.brum.beds.ac.uk/10.3390/ma15155153
Chicago/Turabian StyleWei, Shasha, Renxin Wang, Hu Yang, Ziming Guo, Rongchuan Lin, Qingmin Huang, and Yuhui Zhou. 2022. "Optimization of AlCrSiWN Coating Process Parameters and Performance Study by the Matrix Analysis Method" Materials 15, no. 15: 5153. https://0-doi-org.brum.beds.ac.uk/10.3390/ma15155153