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The Role of Sacrificial and/or Protective Layers to Improve the Sintering of Electroactive Ceramics: Application to Piezoelectric PZT-Printed Thick Films for MEMS

1
Laboratoire IMS, Université de Bordeaux, UMR 5218, 33405 Talence, France
2
CNRS, Université de Bordeaux, ICMCB, UMR-5026, 33600 Talence, France
*
Author to whom correspondence should be addressed.
Received: 11 August 2020 / Revised: 27 September 2020 / Accepted: 20 October 2020 / Published: 16 November 2020
(This article belongs to the Special Issue Innovative Processing Routes for Electroactive Materials)
Piezoelectric thick films are of real interest for devices such as ceramic Micro-ElectroMechanical Systems (MEMS) because they bridge the gap between thin films and bulk ceramics. The basic design of MEMS includes electrodes, a functional material, and a substrate, and efforts are currently focused on simplified processes. In this respect, screen-printing combined with a sacrificial layer approach is attractive due to its low cost and the wide range of targeted materials. Both the role and the nature of the sacrificial layer, usually a carbon or mineral type, depend on the process and the final device. First, a sacrificial layer method dedicated to screen-printed thick-film ceramic and LTCC MEMS is presented. Second, the recent processing of piezoelectric thick-film ceramic MEMS using spark plasma sintering combined with a protective layer approach is introduced. Whatever the approach, the focus is on the interdependent effects of the microstructure, chemistry, and strain/stress, which need to be controlled to ensure reliable and performant properties of the multilayer electroceramics. Here the goal is to highlight the benefits and the large perspectives of using sacrificial/protective layers, with an emphasis on the pros and cons of such a strategy when targeting a complex piezoelectric MEMS design. View Full-Text
Keywords: sacrificial layer; protective layer; thick film; screen-printing; spark plasma sintering; piezoelectric; carbonate sacrificial layer; protective layer; thick film; screen-printing; spark plasma sintering; piezoelectric; carbonate
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MDPI and ACS Style

Debéda, H.; Rua-Taborda, M.-I.; Santawitee, O.; Grall, S.; Maglione, M.; Chung, U-C.; Elissalde, C. The Role of Sacrificial and/or Protective Layers to Improve the Sintering of Electroactive Ceramics: Application to Piezoelectric PZT-Printed Thick Films for MEMS. Ceramics 2020, 3, 453-475. https://0-doi-org.brum.beds.ac.uk/10.3390/ceramics3040038

AMA Style

Debéda H, Rua-Taborda M-I, Santawitee O, Grall S, Maglione M, Chung U-C, Elissalde C. The Role of Sacrificial and/or Protective Layers to Improve the Sintering of Electroactive Ceramics: Application to Piezoelectric PZT-Printed Thick Films for MEMS. Ceramics. 2020; 3(4):453-475. https://0-doi-org.brum.beds.ac.uk/10.3390/ceramics3040038

Chicago/Turabian Style

Debéda, Hélène; Rua-Taborda, Maria-Isabel; Santawitee, Onuma; Grall, Simon; Maglione, Mario; Chung, U-Chan; Elissalde, Catherine. 2020. "The Role of Sacrificial and/or Protective Layers to Improve the Sintering of Electroactive Ceramics: Application to Piezoelectric PZT-Printed Thick Films for MEMS" Ceramics 3, no. 4: 453-475. https://0-doi-org.brum.beds.ac.uk/10.3390/ceramics3040038

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