Atomic Layer Materials and Processes
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D：Materials and Processing".
Deadline for manuscript submissions: closed (31 May 2023) | Viewed by 2545
Special Issue Editors
Interests: atomic layer etching; interconnects and packaging; graphene synthesis and electronics; chemical vapor deposition; quantum devices
Special Issues, Collections and Topics in MDPI journals
Interests: thermal transport; ultrafast laser spectroscopy; phonon and electron transport in nanostructures
Interests: micro/nanofabrication; microsystem; thermal management
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
As device features become ever smaller, materials and fabrication with atomic precision are particularly of interest in the research community. Atomic layer materials such as graphene have demonstrated extraordinary electrical and optical properties for novel devices. Recent advances in the synthesis and processing of unconventional atomic layers, such as MXenes and 2D metal-organic frameworks (MOFs), offer exciting opportunities for next-generation circuits and systems. Equally exciting, disruptive advances in atomic layer deposition (ALD) and atomic layer etching (ALE) continue to provide new abilities for the additive and subtractive fabrication of 3D structures. For instance, isotropic thermal ALE shows advantages in building concave features and minimizing atomic defects in advanced IC circuits, micro-robotics, and micro electromechanical systems (MEMS). Atomic layer materials and processes are the key enabling technologies to engineer structures, functions, and properties in nanostructures, and to integrate atomic layers in industrial manufacturing.
Accordingly, this Special Issue seeks to showcase research papers and review articles that focus on novel advances in atomic layer materials/processes and their applications in electrical/optical devices, quantum circuits, MEMS, and robotics. We look forward to receiving your submissions!
Dr. Haozhe Wang
Dr. Qichen Song
Prof. Dr. Wei Wang
Guest Editors
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
Keywords
- atomic layer materials
- atomic layer etching
- atomic layer deposition
- characterization of atomic structures
- quantum circuits
- MEMS
- micro-robotics
