Micro- and Nanofabrication of Functional Surfaces
A special issue of Nanomaterials (ISSN 2079-4991). This special issue belongs to the section "Nanofabrication and Nanomanufacturing".
Deadline for manuscript submissions: closed (14 October 2023) | Viewed by 1270
Special Issue Editor
Interests: fabrication and characterization of metamaterials; functional properties of nanostructured surfaces; surface wetting phenomena; micro and nanofabrication techniques of polymers, Si and glass; microfluidics; electrophysiology; electrochemical biosensors
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Micro-/nano-fabrication is a node processing technology. It refers to the design, processing, assembly, system integration, and application of submillimeter, micron, and nano-scale components and systems composed of these components. It integrates advanced technological achievements such as advanced tools for nanolithography, dry etching, and thin film deposition, additive manufacturing, optics, nano-electronics, computer micro-chips, sensors, and materials science. Currently, the main drivers for this technology are advanced micro-chips, micro-electromechanical systems (MEMS), and nano-electromechanical systems (NEMS).
Within these systems, the surface plays an important role. Different surface micro-/nano-structures can exhibit interesting functions. The development of high-quality micro-/nano-structures and devices with specific surface functionalities is increasing. At present, the development of functional micro-/nano-structures and devices, such as metamaterials, metasurfaces, flat optics, superwetting surfaces, anti-reflection (moth-eye ones) structures, and other structures or devices is still limited by micro-/nano-fabrication technology. Therefore, this Special Issue focuses on extensive and in-depth studies of surfaces and their functionalities arising from different micro-/nano-fabrication techniques. We hope this Special Issue will provide some references for the improvement of the processing capacity and efficiency of micro-/nano-fabrication technology in the future, as well as the key directions of future research.
Prof. Dr. Rafael Taboryski
Guest Editor
Manuscript Submission Information
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Keywords
- nano- and micro-fabrication
- nano-lithography
- functional surface
- nanopatterning
- 3D printing
- femtosecond laser ablation
- thin film
- dry etching
- metasurfaces
