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MEMS Sensors and Actuators

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Nanosensors".

Deadline for manuscript submissions: closed (30 December 2021) | Viewed by 18054

Special Issue Editors


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Guest Editor
Electrical & Computer Engineering Department, McGill University, Montreal, QC, Canada
Interests: micro and nanoscale electro-mechanical systems; sensors; actuators; integrated electronics
Special Issues, Collections and Topics in MDPI journals

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Guest Editor
MEMS-Vision International Inc., Montreal, QC, Canada
Interests: MEMS/NEMS devices; micro and nanofabrication; sensors; actuators; integrated electronics; CMOS-MEMS integration
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

The importance of micro/nano devices is continuously increasing as they become more widespread in a broad variety of applications, ranging from handheld and wearable electronics to more demanding applications, such as robotics, medical, and space applications.

The aim of this Special Issue is to cover state-of-the-art progress in all aspects of MEMS/NEMS devices. Research articles, short letters, and review papers are encouraged. Contributions from both academia and industry are welcomed. Topics of interest include, but are not limited to, the following:

  • Inertial and tactile sensors;
  • Physical sensors;
  • Chemical sensors;
  • Micro/nano actuators;
  • Medical and implantable micro/nano systems;
  • RF MEMS/NEMS, resonator, and oscillators;
  • Micro/nano fluidic systems;
  • Power MEMS;
  • Integrated photonics and optical MEMS;
  • Acoustic and ultrasonic microsystems;
  • Micro energy harvesters;
  • Micro robots;
  • Biomimetic and bioinspired micro/nano systems;
  • Interfacing and readout electronics for micro/nano systems;
  • Novel materials and micro/nano fabrication processes;
  • New technologies for packaging and integration.

Prof. Dr. Mourad N. El-Gamal
Dr. Mohannad Y. Elsayed
Guest Editors

Keywords

  • Micro/nano actuators
  • RF MEMS/NEMS, resonator, and oscillators
  • Micro/nano fluidic systems
  • Power MEMS

Published Papers (6 papers)

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Research

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15 pages, 4026 KiB  
Article
Towards the World’s Smallest Gravimetric Particulate Matter Sensor: A Miniaturized Virtual Impactor with a Folded Design
by Navpreet Singh, Mohannad Y. Elsayed and Mourad N. El-Gamal
Sensors 2022, 22(5), 1727; https://0-doi-org.brum.beds.ac.uk/10.3390/s22051727 - 23 Feb 2022
Cited by 6 | Viewed by 1935
Abstract
The increasing air pollution across the globe has given rise to a global health crisis that is increasing at an alarming rate. Every year, millions of people lose their lives due to health risks caused by air pollutants. Hence, there is a pressing [...] Read more.
The increasing air pollution across the globe has given rise to a global health crisis that is increasing at an alarming rate. Every year, millions of people lose their lives due to health risks caused by air pollutants. Hence, there is a pressing need for better solutions to accurately measure the amount of air pollution. This work is aimed at designing a highly compact, accurate, low-cost, self-resettable, and easy-to-use gravimetric-based particulate matter sensor solution for portable applications. Previous attempts have failed to realize true miniaturization, due to the size constraints of the virtual impactor needed—a mechanism that segregates the particulate matters based on their sizes. Our complete particulate matter sensor solution consists of three components (i) a piezoelectric resonating membrane, (ii) a virtual impactor, and (iii) a thermophoretic mechanism to reset the sensor. This paper presents a novel design of the virtual impactor, based on a folded configuration. This helps realize the entire system in a volume of 20 mm × 20 mm × 10 mm. We report here the design, working principles, fabrication, and experimental results of the virtual impactor. Full article
(This article belongs to the Special Issue MEMS Sensors and Actuators)
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16 pages, 8930 KiB  
Article
Wide Two-Degree-of-Freedom Static Laser Scanner with Miniaturized Transmission Mechanism and Piezoelectric Actuation
by Takashi Ozaki, Norikazu Ohta and Motohiro Fujiyoshi
Sensors 2021, 21(18), 6077; https://0-doi-org.brum.beds.ac.uk/10.3390/s21186077 - 10 Sep 2021
Cited by 1 | Viewed by 2016
Abstract
In recent years, laser scanners have attracted significant attention for applications such as laser radars. However, the establishment of a two-degree-of-freedom scanner that can quasi-statically drive a large mirror with a large deflection angle has proven to be challenging. In this paper, we [...] Read more.
In recent years, laser scanners have attracted significant attention for applications such as laser radars. However, the establishment of a two-degree-of-freedom scanner that can quasi-statically drive a large mirror with a large deflection angle has proven to be challenging. In this paper, we propose a laser scanner design and fabrication method by combining two unimorph piezoelectric actuators composed of piezoelectric single-crystal Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 and a miniature translation-rotation conversion mechanism with flexible polyimide hinges. The size of the entire scanner was 32 mm × 12 mm × 10 mm. We successfully demonstrated that the scanner could achieve a large quasi-static mechanical deflection angle amplitude of 20.5° in two axes with a 6-mm-square mirror. Full article
(This article belongs to the Special Issue MEMS Sensors and Actuators)
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12 pages, 3465 KiB  
Article
Research on Frequency Doubling Effect of Thermoacoustic Speaker Based on Graphene Film
by Licheng Deng, Xingyue He, Surong He, Qingying Ren, Jiang Zhao and Debo Wang
Sensors 2021, 21(18), 6030; https://0-doi-org.brum.beds.ac.uk/10.3390/s21186030 - 09 Sep 2021
Viewed by 1614
Abstract
In this work, the frequency doubling effect of thermoacoustic speakers is studied, and a method is analyzed to suppress the frequency doubling effect. Three cases were analyzed by superimposing the DC bias on the AC excitation: (1) DC is less than AC; (2) [...] Read more.
In this work, the frequency doubling effect of thermoacoustic speakers is studied, and a method is analyzed to suppress the frequency doubling effect. Three cases were analyzed by superimposing the DC bias on the AC excitation: (1) DC is less than AC; (2) DC is equal to AC; (3) DC is greater than AC. We found that the frequency doubling effect can be well suppressed by superimposing a larger DC excitation on the AC excitation. The laser scribing technology was used to prepare graphene film in only one step, and the screen printing technology was used to prepare conductive electrodes. The microphone and B&K system was used to record the sound pressure level and study the suppression of frequency doubling effect. Finally, the sound pressure levels with the three different kinds of excitations were measured. The measured results show that they have a good agreement with the theoretical results. The suppression effect will be better when DC amplitude is greater than AC amplitude. Therefore, this work has certain reference significance for the further study and application of thermoacoustic speakers. Full article
(This article belongs to the Special Issue MEMS Sensors and Actuators)
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26 pages, 8879 KiB  
Article
Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning
by Michael Haub, Martin Bogner, Thomas Guenther, André Zimmermann and Hermann Sandmaier
Sensors 2021, 21(11), 3795; https://0-doi-org.brum.beds.ac.uk/10.3390/s21113795 - 30 May 2021
Cited by 4 | Viewed by 2929
Abstract
Most accelerometers today are based on the capacitive principle. However, further miniaturization for micro integration of those sensors leads to a poorer signal-to-noise ratio due to a small total area of the capacitor plates. Thus, other transducer principles should be taken into account [...] Read more.
Most accelerometers today are based on the capacitive principle. However, further miniaturization for micro integration of those sensors leads to a poorer signal-to-noise ratio due to a small total area of the capacitor plates. Thus, other transducer principles should be taken into account to develop smaller sensors. This paper presents the development and realization of a miniaturized accelerometer based on the tunneling effect, whereas its highly sensitive effect regarding the tunneling distance is used to detect small deflections in the range of sub-nm. The spring-mass-system is manufactured by a surface micro-machining foundry process. The area of the shown polysilicon (PolySi) sensor structures has a size smaller than 100 µm × 50 µm (L × W). The tunneling electrodes are placed and patterned by a focused ion beam (FIB) and gas injection system (GIS) with MeCpPtMe3 as a precursor. A dual-beam system enables maximum flexibility for post-processing of the spring-mass-system and patterning of sharp tips with radii in the range of a few nm and initial distances between the electrodes of about 30–300 nm. The use of metal–organic precursor material platinum carbon (PtC) limits the tunneling currents to about 150 pA due to the high inherent resistance. The measuring range is set to 20 g. The sensitivity of the sensor signal, which depends exponentially on the electrode distance due to the tunneling effect, ranges from 0.4 pA/g at 0 g in the sensor operational point up to 20.9 pA/g at 20 g. The acceleration-equivalent thermal noise amplitude is calculated to be 2.4–3.4 mg/Hz. Electrostatic actuators are used to lead the electrodes in distances where direct quantum tunneling occurs. Full article
(This article belongs to the Special Issue MEMS Sensors and Actuators)
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15 pages, 5258 KiB  
Article
A Low-Cost Multi-Parameter Water Quality Monitoring System
by Arif Ul Alam, Dennis Clyne and M. Jamal Deen
Sensors 2021, 21(11), 3775; https://0-doi-org.brum.beds.ac.uk/10.3390/s21113775 - 29 May 2021
Cited by 20 | Viewed by 6175
Abstract
Multi-parameter water quality monitoring is crucial in resource-limited areas to provide persistent water safety. Conventional water monitoring techniques are time-consuming, require skilled personnel, are not user-friendly and are incompatible with operating on-site. Here, we develop a multi-parameter water quality monitoring system (MWQMS) that [...] Read more.
Multi-parameter water quality monitoring is crucial in resource-limited areas to provide persistent water safety. Conventional water monitoring techniques are time-consuming, require skilled personnel, are not user-friendly and are incompatible with operating on-site. Here, we develop a multi-parameter water quality monitoring system (MWQMS) that includes an array of low-cost, easy-to-use, high-sensitivity electrochemical sensors, as well as custom-designed sensor readout circuitry and smartphone application with wireless connectivity. The system overcomes the need of costly laboratory-based testing methods and the requirement of skilled workers. The proposed MWQMS system can simultaneously monitor pH, free chlorine, and temperature with sensitivities of 57.5 mV/pH, 186 nA/ppm and 16.9 mV/°C, respectively, as well as sensing of BPA with <10 nM limit of detection. The system also provides seamless interconnection between transduction of the sensors’ signal, signal processing, wireless data transfer and smartphone app-based operation. This interconnection was accomplished by fabricating nanomaterial and carbon nanotube-based sensors on a common substrate, integrating these sensors to a readout circuit and transmitting the sensor data to an Android application. The MWQMS system provides a general platform technology where an array of other water monitoring sensors can also be easily integrated and programmed. Such a system can offer tremendous opportunity for a broad range of environmental monitoring applications. Full article
(This article belongs to the Special Issue MEMS Sensors and Actuators)
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Review

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29 pages, 64743 KiB  
Review
Determination of Drugs in Clinical Trials: Current Status and Outlook
by Babak Tavana and Aicheng Chen
Sensors 2022, 22(4), 1592; https://0-doi-org.brum.beds.ac.uk/10.3390/s22041592 - 18 Feb 2022
Cited by 4 | Viewed by 2539
Abstract
All pharmaceutical drugs, vaccines, cosmetic products, and many medical breakthroughs must first be approved through clinical research and trials before advancing to standard practice or entering the marketplace. Clinical trials are sets of tests that are required to determine the safety and efficacy [...] Read more.
All pharmaceutical drugs, vaccines, cosmetic products, and many medical breakthroughs must first be approved through clinical research and trials before advancing to standard practice or entering the marketplace. Clinical trials are sets of tests that are required to determine the safety and efficacy of pharmaceutical compounds, drugs, and treatments. There is one pre-phase and four main clinical phase requirements that every drug must pass to obtain final approval. Analytical techniques play a unique role in clinical trials for measuring the concentrations of pharmaceutical compounds in biological matrices and monitoring the conditions of patients (or volunteers) during various clinical phases. This review focuses on recent analytical methods that are employed to determine the concentrations of drugs and medications in biological matrices, including whole blood, plasma, urine, and breast milk. Four primary analytical techniques (extraction, spectroscopy, chromatography, and electrochemical) are discussed, and their advantages and limitations are assessed. Subsequent to a survey of evidence and results, it is clear that microelectromechanical system (MEMS) based electrochemical sensor and biosensor technologies exhibit several notable advantages over other analytical methods, and their future prospects are discussed. Full article
(This article belongs to the Special Issue MEMS Sensors and Actuators)
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