MEMS Sensors and Actuators
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Nanosensors".
Deadline for manuscript submissions: closed (30 December 2021) | Viewed by 18054
Special Issue Editors
Interests: micro and nanoscale electro-mechanical systems; sensors; actuators; integrated electronics
Special Issues, Collections and Topics in MDPI journals
Interests: MEMS/NEMS devices; micro and nanofabrication; sensors; actuators; integrated electronics; CMOS-MEMS integration
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
The importance of micro/nano devices is continuously increasing as they become more widespread in a broad variety of applications, ranging from handheld and wearable electronics to more demanding applications, such as robotics, medical, and space applications.
The aim of this Special Issue is to cover state-of-the-art progress in all aspects of MEMS/NEMS devices. Research articles, short letters, and review papers are encouraged. Contributions from both academia and industry are welcomed. Topics of interest include, but are not limited to, the following:
- Inertial and tactile sensors;
- Physical sensors;
- Chemical sensors;
- Micro/nano actuators;
- Medical and implantable micro/nano systems;
- RF MEMS/NEMS, resonator, and oscillators;
- Micro/nano fluidic systems;
- Power MEMS;
- Integrated photonics and optical MEMS;
- Acoustic and ultrasonic microsystems;
- Micro energy harvesters;
- Micro robots;
- Biomimetic and bioinspired micro/nano systems;
- Interfacing and readout electronics for micro/nano systems;
- Novel materials and micro/nano fabrication processes;
- New technologies for packaging and integration.
Prof. Dr. Mourad N. El-Gamal
Dr. Mohannad Y. Elsayed
Guest Editors
Keywords
- Micro/nano actuators
- RF MEMS/NEMS, resonator, and oscillators
- Micro/nano fluidic systems
- Power MEMS