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Advancements in Micro and Nanoelectromechanical Devices

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: closed (15 January 2022) | Viewed by 2085

Special Issue Editors


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Guest Editor
Department of Electrical and Computer Engineering, Northeastern University, Boston, MA 02115, USA
Interests: MEMS/NEMS; RF circuits; nonlinear dynamics

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Guest Editor
Texas Instruments, Kilby Labs, Santa Clara, CA 95051, USA
Interests: MEMS/NEMS; frequency stability and damping; analog design; packaging

Special Issue Information

Dear Colleagues,

In the last few decades, micro- and nanoelectromechanical systems (MEMS/NEMS) research has advanced at an unprecedented pace, impacting a variety of disciplines, spanning from communication and sensing to computing and medicine. As a result, several MEMS/NEMS devices have become commercially available and today play a fundamental role in many existing integrated systems thanks to their ability to meet critical and heterogeneous needs that cannot be addressed by other miniaturized technologies. Lately, even more advanced MEMS/NEMS devices have been reported, defining new technological paradigms in the traditional fields of application and opening new possibilities in incipient fields such as the Internet of Things (IoT), quantum computing and sensing, and autonomous vehicles. Such impressive progress in the development of MEMS/NEMS devices has been driven by a continuous understanding of their underlying physics and their device operation, as well as by a strong advancement in finite element (FE) modeling and microfabrication techniques.

The aim of this Special Issue is to present the most advanced research, the latest achievements, and the technological developments of MEMS/NEMS and their applications in topics including (but not limited to) the following:

  1. 5G communication;
  2. Internet of Things (IoT) and embedded systems;
  3. Quantum communication and sensing;
  4. Optics and optomechanics;
  5. Frequency generation, stability, and noise;
  6. Ultrasound imaging;
  7. Nonlinear dynamics;
  8. Finite element modeling;
  9. Sensing in harsh environments;
  10. Energy harvesting;
  11. Advanced computing beyond von Neumann;
  12. Medical and wearable devices;
  13. Power MEMS;
  14. Microfluidics;
  15. Advancements in packaging and microfabrication;
  16. Novel materials and physics;
  17. Optical MEMS by microrobotics.

Dr. Cristian Cassella
Dr. Jeronimo Segovia Fernandez
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Published Papers (1 paper)

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Research

12 pages, 4083 KiB  
Article
Bidirectional Drive with Inhibited Hysteresis for Piezoelectric Actuators
by Weiqing Huang, Junkai Lian, Dawei An, Mingyang Chen and Yinfeng Lei
Sensors 2022, 22(4), 1546; https://0-doi-org.brum.beds.ac.uk/10.3390/s22041546 - 17 Feb 2022
Cited by 4 | Viewed by 1629
Abstract
Piezoelectric actuators with a flexible displacement amplification structure are widely used in the fields of precision driving and positioning. The displacement curve of conventional piezoelectric actuators is asymmetrical and non-linear, which leads to large non-linear errors and reduced positioning accuracy of these piezoelectric [...] Read more.
Piezoelectric actuators with a flexible displacement amplification structure are widely used in the fields of precision driving and positioning. The displacement curve of conventional piezoelectric actuators is asymmetrical and non-linear, which leads to large non-linear errors and reduced positioning accuracy of these piezoelectric actuators. In this paper, a bidirectional active drive piezoelectric actuator is proposed, which suppresses the hysteresis phenomenon to a certain extent and reduces the non-linear error. Based on the deformation theory of the beam, a theoretical model of the rhombus mechanism was established, and the key parameters affecting the drive performance were analyzed. Then, the static and dynamic characteristics of series piezoelectric actuators were analyzed by the finite element method. A prototype was manufactured and the output performance was tested. The results show that the actuator can achieve a bidirectional symmetric output of amplification displacement, with a maximum value of 91.45 μm and a resolution of 35 nm. In addition, compared with the hysteresis loop of the piezoelectric stack, the nonlinear error is reduced by 62.94%. Full article
(This article belongs to the Special Issue Advancements in Micro and Nanoelectromechanical Devices)
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